Static pressure gas radial bearing with elastic wave foil support

Abstract

The invention discloses a static pressure gas radial bearing with an elastic wave foil support. The static pressure gas radial bearing comprises a bearing base, an elastic wave foil, a bearing inner ring, an inner ring positioning pin and a fixing gasket. A fixing groove is formed in the bearing base, and the elastic wave foil is welded in the fixing groove through a fixing gasket. A certain number of throttling holes are evenly formed in the bearing base and the bearing inner ring in the circumferential direction, and positioning grooves are formed in the side faces of the bearing base and the bearing inner ring. The inner ring positioning pin is located in the positioning groove and can prevent the bearing inner ring from rotating in the circumferential direction. The elastic wave foil and the bearing inner ring are additionally arranged, the elastic wave foil can play a role in elastic supporting, a shaft is allowed to have larger vibration amplitude, and the stability and impact resistance of the bearing are improved; the bearing inner ring is convenient to replace, and the cost is reduced; meanwhile, a plurality of rows of uniformly-distributed throttling holes are formed in the bearing base and the bearing inner ring so that the air supply uniformity can be improved; and a double-layer throttling hole structure can reduce the punching depth and reduce the machining difficulty.

Description

technical field [0001] The invention belongs to the field of gas bearings and high-speed rotating machines, in particular to a static pressure gas radial bearing with elastic wave foil support. Background technique [0002] Hydrostatic gas radial bearings have the advantages of low vibration, high rotation accuracy, low friction loss, long life and no pollution to the environment, and are widely used in aerospace industry, semiconductor industry, ultra-precision processing equipment and precision measuring equipment. Bearing stiffness is the main performance index of hydrostatic gas radial bearings and the key to ensuring bearing accuracy. The load capacity and stiffness of the static pressure gas bearing are related to the throttling form, the air supply pressure and the structural form of the support. The throttling methods of hydrostatic gas bearings are mainly small hole throttling, slit throttling, surface throttling and porous throttling. At present, there are differ...

AI Technical Summary

Problems solved by technology

The widely used small hole throttle static pressure gas radial bearing has high rigidity, but its bearing capacity is low and the stability is poor

At present, the bearing capacity of small orifice static pressure gas radial bearings is usually improved by high gas supply pressure, but small orifice static pressure gas radial bearings are prone to air hammer vibration when the gas supply pressure is high, resulting in Bearing failure, which greatly restricts the improvement of bearing capacity

At the same time, in the case of high-speed rotation of the main shaft, if the rotor is unstable due to external impact and disturbance, sintering and adhesion will occur between the main shaft and the bearing, resulting in serious wear and tear of the main shaft and bearing, which will seriously affect the safety and stability of the equipment. run

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