Hydrophobic membrane structure, detection method and detection system thereof, and wafer carrier

Abstract

The embodiment of the invention relates to the field of semiconductors, and discloses a hydrophobic membrane structure, a detection method and a detection system thereof, and a wafer carrier. The hydrophobic membrane structure provided by the invention comprises a color-changing layer and a hydrophobic layer covering the surface of the color-changing layer; and when the color-changing layer is in contact with liquid, the color of the area, in contact with the liquid, of the color-changing layer changes to form a color-changing area. Compared with the prior art, according to the embodiment, the hydrophobic layer covers the surface of the color-changing layer, when the hydrophobic layer is broken, liquid flows into the color-changing layer through the broken area of the hydrophobic layer, and the color of the color-changing layer changes due to the fact that the color-changing layer makes contact with the liquid. Therefore, in the detection process of the hydrophobic membrane structure, whether the hydrophobic membrane structure is damaged or not is detected through the change of the color, so that the hydrophobic membrane structure is replaced in time, and the problem that the hydrophobic membrane structure is damaged only when a product or equipment goes wrong is solved.

Description

Technical field [0001] Embodiment of the invention relates to the field of semiconductor, particularly to a hydrophobic film structure and detection method, the detection system, the wafer carrier. Background technique [0002] In the field of semiconductor technology, in particular in wafer fabrication process, a high cleanliness requirements for the wafer carrier, and therefore, the current practice is commonly disposed on the periphery of the wafer carrier and the other having a gap junction structure title hydrophobic membrane structures to prevent contamination of the wafer carrier, thus improving the yield of the wafer. Further, the prior art, the detection of the hydrophobic membrane structure needs the periodic PM (Preventive maintenance, production and maintenance) visual inspection of the structure of a hydrophobic membrane is broken. [0003] The inventor finds at least the following problems in the prior art: art, there is a problem only when the product or equipment ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the embodiment of the present invention is to provide a hydrophobic membrane structure and its detection method, detection system, and wafer carrier, so that when the hydrophobic membrane structure is broken, the hydrophobic The color of the membrane structure changes, so as to solve the problem that the hydrophobic membrane structure is damaged only when there is a problem with the product or equipment

Therefore, in the process of detecting the hydrophobic membrane structure, through the change of color, it is detected whether the hydrophobic membrane structure is damaged, so as to replace it in time, and solve the problem in the prior art that the hydrophobic membrane structure is only found to be damaged when there is a problem with the product or equipment

Images