Micro-LED transfer method and device

Abstract

The invention discloses a Micro-LED transfer method. The method comprises the steps that a discharging device is controlled to place a preset number of chips according to the number of assembly grooves in a transfer substrate; the chips are uniformly distributed in the liquid in the preset box under the action of an ultrasonic oscillator; a control valve at the bottom of the preset box is opened, and the liquid flos into the transfer box through a connected pipeline; the control valve is adjusted according to the liquid level height in the transfer box, and the liquid level height is stable; whether all the assembling grooves are correctly matched or not is determined according to comparison of the liquid flow flowing into the transfer box and the liquid flow flowing out of the transfer box; and the redundant chips fall down from the transfer substrate along with the flowing of the liquid, and are discharged into the liquid storage tank through the drainage groove to be recycled. Therefore, the Micro-LED chip is diffused under the action of liquid flow, self-assembly is carried out through suction force, mass transfer is realized, the operation is simple, and meanwhile, the transfer completion rate is also convenient to detect. The transfer device provided by the invention also has the above beneficial effects.

Description

technical field [0001] The invention relates to the technical field of semiconductor display manufacturing, in particular to a method and device for transferring Micro-LEDs. Background technique [0002] The micron-level pixel pitch of Micro-LED can make it cover multiple application scenarios from small and medium-sized displays to medium and large-sized displays. Compared with traditional small-pitch LEDs, the display resolution and image quality are significantly improved due to the size reduction. Optical design It can make the viewing angle wider, the contrast ratio is higher, and the image quality is better. It is suitable for various display scenarios such as virtual reality, small projectors, microdisplays, visible light communication, and medical research. [0003] At present, the mass transfer methods of Micro-LED mainly include precise pick-up, laser transfer, roller transfer printing and self-assembly. The American company LuxVue proposed the electrostatic force ...

AI Technical Summary

Problems solved by technology

[0004] To sum up, the current mass transfer method and device for Micro-LEDs require a large number of transfer head matrices or pretreatment of chips to achieve mass transfer of Micro-LEDs, but these key molds and processing steps will inevitably increase costs. , reducing the transfer efficiency, and it is not convenient to detect the transfer completion rate, so the above problems need to be solved

Images