Three-dimensional shape precise control machining system and method
A technology of precise control and three-dimensional shape, applied in the direction of manufacturing tools, metal processing equipment, welding equipment, etc., can solve the problems of three-dimensional structure shape and size that cannot be precisely processed, so as to reduce roughness, reduce cost, and improve control accuracy Effect
Active Publication Date: 2021-08-31
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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[0006] The purpose of the present invention is to solve the problem that the existing three-dimensional structure shape and size cannot be precisely processed, and to provide a three-dimensional shape precise control processing system and processing method
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[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention.
[0041] The invention provides a three-dimensional shape precise control processing system and processing method. The method combines off-line detection and layered variable power control in the processing process to effectively control the bottom surface shape and processing depth of the three-dimensional structure to realize three-dimensional Machining quality control of 3D profile topography during ultra-precision machining of structures. The device required by this method has a simple structure and low cost, and only needs to add a confocal displacement sensor in the scanning galvanometer system, so it can be applied to the precise machining of three-dimensional structures on the surface of different materials. At the same time, the system and method can adjust the laser pr...
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The invention provides a three-dimensional shape precise control machining system and method. The problem that the shape and size of an existing three-dimensional structure cannot be precisely machined is solved. According to the system and method, a confocal displacement sensor is arranged on a laser machining head; firstly, the spatial position posture of a machined part is adjusted in a high-precision mode through the confocal displacement sensor, and therefore high-precision positioning and benchmark correction of the machined part are completed; secondly, the relative position between the confocal displacement sensor and a laser focus is calibrated, and a foundation is laid for focus following after workpiece materials are removed through subsequent laser scanning; and thirdly, the three-dimensional morphology of each layer after laser scanning is measured through the confocal displacement sensor, and the roughness of the bottom surface morphology and the processing depth control precision can be greatly improved in combination with orthogonal layer-by-layer scanning and variable monopulse energy modes.
Description
technical field [0001] The invention belongs to the field of laser processing, and in particular relates to a three-dimensional shape precise control processing system and processing method. Background technique [0002] Due to the advantages of non-contact, near "cold processing", no pollution and wide applicability of materials, laser processing technology has become a key technology for processing various functional structures and three-dimensional fine structures. However, since the laser has a certain depth of focus, how to achieve precise machining of three-dimensional structures has become a difficulty. [0003] Chinese patent CN107498189A discloses a laser processing method for a three-dimensional V-shaped groove structure on a metal surface. In this method, after obtaining the data of the V-shaped groove, the processing of each layer of material and the control of the contour are realized through scanning processing of a rectangular frame. However, this method does...
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IPC IPC(8): B23K26/0622B23K26/046B23K26/70
CPCB23K26/0622B23K26/046B23K26/702
Inventor 李明李晨晨
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI