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A polarization-tunable terahertz photoconductive antenna and its preparation method

A photoconductive antenna, terahertz technology, applied in antennas, antenna parts, antenna supports/installation devices, etc., can solve the problems of complex optical path and low signal-to-noise ratio of the system, reduce the use of polarizers, improve The effect of the signal-to-noise ratio

Active Publication Date: 2022-05-13
CHONGQING UNIV OF POSTS & TELECOMM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is that the signal-to-noise ratio of the terahertz spectrum of anisotropic substances obtained from the existing THz-TDS system is low, and the optical path of the entire THz-TDS system is complicated; in order to solve this technical problem, this The invention provides a polarization-tunable terahertz photoconductive antenna and its preparation method. The research on the polarization-variable terahertz photoconductive antenna can improve the signal-to-noise ratio of the terahertz spectrum of optically anisotropic materials, which is a highly integrated THz-TDS system lay the foundation

Method used

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  • A polarization-tunable terahertz photoconductive antenna and its preparation method
  • A polarization-tunable terahertz photoconductive antenna and its preparation method
  • A polarization-tunable terahertz photoconductive antenna and its preparation method

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Embodiment 1

[0069] Such as figure 1 with figure 2 As shown, a polarization-tunable terahertz photoconductive antenna of the present invention is applied to a terahertz spectroscopy system, including: a semiconductor substrate layer 1, a dielectric layer 2 and a pattern layer;

[0070] The pattern layer is closely attached to the surface of the dielectric layer 2, and the dielectric layer 2 is located on the surface of the semiconductor substrate layer 1;

[0071] The pattern layer includes an electrode structure, and the electrode structure includes four antenna electrodes arranged symmetrically in the center.

[0072] Such as image 3 The four antenna electrodes shown are triangular electrodes. Four isosceles right-angled triangular electrodes are symmetrically arranged in the center obtained by uniform openings along both sides of the diagonal line of a square electrode, and the right angles of the triangular electrodes point to the center of symmetry.

[0073] When the femtosecond ...

Embodiment 2

[0085] This embodiment provides the preparation method of the polarization-tunable terahertz photoconductive antenna in the previous embodiment. The preparation process of the polarization-tunable photoconductive antenna includes the design and preparation of an optical mask, coating the electrode structure by sputtering, and photolithography. Micro-nano structure, IBE etching electrodes, glue removal, and finally cutting to obtain a single polarization-tunable photoconductive antenna structure.

[0086] Specific steps are as follows:

[0087] 1. Feeding preparation. A gallium arsenide wafer prepared by low-temperature growth with a suitable size is selected.

[0088] 2. Spin-coat a layer of photoresist on the LT-GaAs, and then bake at 100°C for 2 minutes.

[0089] 3. Use a soft template with sub-micron precision nano-graphic structure for heat-assisted UV imprinting, so that the metal nano-layer pattern is transferred to the adhesive film, and the soft template is removed; ...

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Abstract

The invention discloses a polarization-tunable terahertz photoconductive antenna and a preparation method thereof, which are applied to a terahertz spectrum system, comprising: a semiconductor substrate layer, a medium layer and a pattern layer; the pattern layer is closely attached to the surface of the medium layer, and the medium layer is located The surface of the semiconductor substrate layer; the pattern layer includes an electrode structure, and the electrode structure includes 4 antenna electrodes arranged symmetrically in the center; combined with the symmetrical structure of the electrode and the application method of the bias voltage of the epitaxial electrode, an anisotropic multiplication of 45° is finally achieved. Anisotropic linearly polarized tunable terahertz radiation, this structure can realize 8 directions of polarization tunable; it not only reduces the use of polarizers in the terahertz time-domain spectroscopy system, but also improves the signal-to-noise ratio of the terahertz spectrum of the measured substance.

Description

technical field [0001] The invention relates to an antenna tool, in particular to a polarization-tunable terahertz photoconductive antenna and a preparation method thereof. Background technique [0002] Compared with other frequency bands, the lack of efficient and practical terahertz sources in the hertz frequency band has led to the slow development of related technologies. The emergence of ultrafast optical technologies that generate terahertz waves has promoted research in the terahertz band. [0003] There are two main types of existing terahertz sources: photoconductive dipole antenna technology and optical rectification effect. Photoconductive dipole antennas are widely used in terahertz emission due to their simplicity, compactness and easy coupling with optical fibers. and detection. [0004] In a typical THz-TDS system, to detect the terahertz spectrum of some substances (with optical anisotropy in the terahertz band), it is necessary to use a pair of terahertz ph...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01Q1/22H01Q1/38
CPCH01Q1/2283H01Q1/38
Inventor 潘武刘博文肖惠云杨龙亮
Owner CHONGQING UNIV OF POSTS & TELECOMM