Soft capacitive pressure sensors
A pressure sensor, sensor technology, applied in pressure sensor, mechanical mode conversion, cardiac catheterization, etc., can solve the problem of insufficient dynamic range of pressure sensor
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[0060] The following is a list of elements that correspond to the specific elements referred to herein:
[0061] 100 capacitive pressure sensor
[0062] 110 first electrode layer
[0063] 120 second electrode layer
[0064] 112, 122 Elastomer layers
[0065] 114, 124 conductive film
[0066] 125 ridge
[0067] 30 dielectric layer
[0068] 140 air gap
[0069] see Figures 1A-1B , in certain embodiments, the present invention has a capacitive pressure sensor (100). The sensor (100) may include a first electrode layer (110), a second electrode layer (120), and a dielectric layer (130) juxtaposed between the first and second electrode layers (110, 120). When the sensor (100) is in the Figure 1A In the rest configuration shown, an air gap (140) is provided between the first electrode layer (110) and the second electrode layer (120). The air gap (140) may serve as a second dielectric layer. In a preferred embodiment, the sensor (100) is bendable, compressible and flexib...
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