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Manufacturing process of micro-fluidic chip with various microstructures

A technology of microfluidic chip and manufacturing process, which is applied in the direction of laboratory equipment, laboratory containers, chemical instruments and methods, etc., can solve the problem of lack of microfluidic chips with various microstructures, and achieve reduced production costs, Good reusability and high applicability

Inactive Publication Date: 2021-09-14
镇江华瑞芯片科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

With the continuous development of microfluidic-related technology research, the demand for biochemical, medical analysis and other industries continues to expand, and higher requirements are put forward for the microchannel structure of microfluidic chips. Existing microfluidic chips are difficult to Meet some new requirements, so there is a lack of a microfluidic chip with a variety of microstructures on the market

Method used

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Embodiment Construction

[0017] In order to deepen the understanding of the present invention, the present invention will be described in further detail below in conjunction with the examples, which are only used to explain the present invention and do not constitute a limitation to the protection scope of the present invention.

[0018] A manufacturing process of a microfluidic chip with various microstructures, comprising the following steps:

[0019] (1) Design the overall structure of the micro-flow chip, and split and stack the micro-flow chip according to different microstructures to obtain several chip templates with independent microstructures;

[0020] (2) Coating photoresist with a thickness of 3-5 μm on the chip template;

[0021] (3) Aligning the chip template and the mask plate corresponding to the chip template under the condition of ultraviolet exposure;

[0022] (4) successively process the chip template covered with the mask plate by photolithography development and deep silicon etch...

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Abstract

The invention discloses a manufacturing process of a micro-fluidic chip with various microstructures. Compared with an existing manufacturing process of a micro-fluidic chip, the manufacturing process has the advantages that the various microstructures are split and laminated into a plurality of single-layer chips, so that the bonded micro-fluidic chip has high applicability, and meanwhile, the chip template obtained through photoetching development and deep silicon etching treatment has a very good reuse rate, the manufacturing process of the micro-fluidic chip is simplified, and the manufacturing cost of the micro-fluidic chip is reduced.

Description

technical field [0001] The invention belongs to the field of microfluidic chip manufacturing, and in particular relates to a manufacturing process of a microfluidic chip with various microstructures. Background technique [0002] Microfluidic chips can realize the main functions of large-scale and multi-functional biochemical analysis laboratories. With their advantages of miniaturization, low consumption, rapid analysis and automation, they are widely used in disease diagnosis, food safety, epidemic control, environmental monitoring and other fields. In terms of structure, microfluidic chips need to form closed micro / nano channels to realize mixing, reaction, separation and other processes. With the continuous development of microfluidic-related technology research, the demand for biochemical, medical analysis and other industries continues to expand, and higher requirements are put forward for the microchannel structure of microfluidic chips. Existing microfluidic chips ar...

Claims

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Application Information

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IPC IPC(8): B01L3/00
CPCB01L3/502707B01L2300/16B01L2200/10
Inventor 卫勇
Owner 镇江华瑞芯片科技有限公司