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Microlens array

A micro-lens array and micro-lens technology, applied in the field of micro-optics, can solve problems such as the large influence of the micro-lens array, and achieve the effects of improving optical performance, expanding the adjustment range, and reducing the influence of optical performance.

Pending Publication Date: 2021-09-21
SIWAVE INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the prior art, the structure of the microlens array is greatly affected by the manufacturing process, which makes it have great limitations in practical applications

Method used

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Effect test

Embodiment 1

[0052] figure 1A schematic structural diagram of a microlens array provided by an embodiment of this specification.

[0053] Such as figure 1 As shown, the microlens array in this embodiment is located on the surface of the substrate, including: a platform structure 11 and a plurality of microlens structures 12 .

[0054] The platform structure 11 is located on the surface of the substrate.

[0055] A plurality of microlens structures 12 are arrayed above the platform structure 11 .

[0056] When the parallel incident light passes through the microlens array to cover the substrate surface, the height of the platform structure 11, the focal length of the microlens structure 12 and the area covered by the incident light on the substrate surface, the three satisfy the following relationship:

[0057] By separately setting the height of the platform structure 11 and the focal length of the microlens structure 12 , the parallel incident light passes through the microlens structu...

Embodiment 2

[0090] On the basis of Embodiment 1, Embodiment 2 of this specification provides a microlens array applied to the surface of a substrate on which an array of optical devices is formed.

[0091] In Embodiment 2, the same explanations are omitted for the same devices as in Embodiment 1. FIG.

[0092] figure 2 A schematic structural diagram of a microlens array provided by an embodiment of this specification.

[0093] Such as figure 2 As shown, the microlens array in this embodiment is located on the surface of the substrate, and includes a platform structure 21 and a plurality of microlens structures 22 .

[0094] An array of optical devices is formed on the surface of the substrate.

[0095] In the embodiment of this specification, the optical device includes at least one of a photosensitive device and a light source device.

[0096]Wherein, the photosensitive device is used to receive incident light that passes through the microlens array and covers the surface of the su...

Embodiment 3

[0125] Vertical cavity surface emitting laser (VCSEL), as an important light source, can be used for low optical power data communication and parallel optical interconnection, as well as a series of high optical power applications, such as optical pumping, optical driving, 3D perception and LiDAR systems, etc. .

[0126] In practical applications, the large beam divergence angle of VCSEL arrays tends to reduce the far-field beam profile, which severely limits the working distance of VCSEL integrated systems. Therefore, VCSEL arrays usually need to be used in conjunction with external micro-optical components to improve their beam collimation or focus.

[0127] However, due to the size of the vertical cavity surface emitting laser and the thermal reflow process, the curvature diameter R and the crown height h of the microlens structure integrated on the substrate are determined to be small. L Higher, shorter focal length f, and larger intersection angle a lead to poor collimat...

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PUM

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Abstract

An embodiment of the invention discloses a microlens array. The microlens array comprises: a platform structure, which is located on the surface of a substrate; and a plurality of microlens structures, which are arranged above the platform structure in an array manner. According to the invention, when parallel incident light passes through the microlens array to cover the surface of the substrate, the height of the platform structure, the focal length of the microlens structures and the area, covered by the incident light, of the surface of the substrate satisfies the relationship that through the height of the platform structure and the focal length of the microlens structures which are respectively set, the parallel incident light passes through the micro-lens structures and the platform structure and then covers the surface of the substrate with a preset area.

Description

technical field [0001] The present application relates to the field of micro-optics technology, in particular to a micro-lens array. Background technique [0002] Microlens array (microlens array, MLA) is composed of a plurality of small lenses with micron-scale feature size. It has basic functions such as focusing and imaging, and has the characteristics of small unit size and high integration. The completed functions are the core components of many new optical systems, such as visible light / infrared imaging, laser array scanning, beam homogenization and shaping, beam focusing and collimation, laser display, wavefront sensing, fiber coupling and other systems. [0003] In the prior art, the structure of the microlens array is greatly affected by the manufacturing process, which causes great limitations in its practical application. [0004] In order to solve the above problems, it is urgent to provide a microlens array with good adaptability. Contents of the invention ...

Claims

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Application Information

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IPC IPC(8): G02B3/00G02B19/00
CPCG02B3/0037G02B3/0056G02B19/0014G02B19/0076
Inventor 焦继伟陈思奇
Owner SIWAVE INC
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