Calculation method of secondary electron yield based on first principle
A technology of secondary electrons and calculation methods, which is applied in computational theoretical chemistry, computer material science, complex mathematical operations, etc., can solve problems such as deviation, difficulty in obtaining experimental optical data, and difficulty in simulating the electronic motion process. The effect of good promotion value
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[0026] The present invention will be further elaborated below in conjunction with embodiment.
[0027] Firstly, according to the lattice type, lattice length, element type and composition of the material, and using the pseudopotential of each atom, the exchange correlation energy of the material is obtained, and the convergence is obtained by iteratively solving the Cohen-Shen Lujiu equation The electron density functional of the material can be used to obtain the electron energy loss function in the material and the work function of the material surface. Then, the Monte Carlo simulation method is used to track the whole excitation and emission process of the internal electrons, and finally, the secondary electron emission yield that does not depend on the experimental data is obtained.
[0028] The present invention is a calculation method of secondary electron yield based on first principles, adopting a first principle calculation method that does not depend on experimental ...
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