High-precision galvanometer motor feedback system and design method thereof

Abstract

The embodiment of the invention belongs to the technical field of high-precision scanning galvanometer motors, and relates to a high-precision galvanometer motor feedback system and a design method thereof. The technical scheme provided by the invention comprises the following steps: arranging at least one group of encoders at two centrosymmetric ends of a grating disc according to the diameter direction of the grating; enabling the positions of the zero scale lines of the grating to be in one-to-one correspondence with the position of the optical center point of the encoder; and connecting an output signal of the encoder to a signal processing circuit board. A plurality of encoders work together, a galvanometer motor multi-coding special grating disc is redesigned to ensure that each encoder can correctly recognize the zero position under the swinging condition, then the encoders are placed on the same grating disc according to the specific position, and a specific algorithm is supplemented, so the position error during final output is reduced, and the influence of eccentricity, radial shaking drifting and the like is weakened. The precision and the stability of the galvanometer motor system are improved, and the eccentricity resistance and the drift resistance of the galvanometer motor system are improved.

Description

technical field [0001] This application relates to the technology of high-precision scanning galvanometer motors, and more specifically, to a high-precision galvanometer motor feedback system and its design method. Background technique [0002] In the current field of laser processing and optical scanning, the guiding control of laser or other scanning signals is mainly realized by a rotating motor that can reciprocate within a certain range or angle to drive a mirror. This kind of motor that can drive the mirror to swing with high speed and high precision is usually called a vibrating mirror motor. This motor is different from ordinary motors. It can only swing within a certain angle because it cannot rotate a circle. Therefore, during the movement, the zero mark line of the main grating must appear in the encoder field of view. And because it controls the deflection angle of the mirror used to reflect light, it has extremely high requirements for precision and responsiven...

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to provide a high-precision vibrating mirror motor feedback system and its design method, which can solve the problems of encoder accuracy and radial shaking, and realize the reduction of the position error in the final output through the joint work of multiple encoders, and weaken the The influence of eccentricity, radial shaking and drift, etc.

Images