Multi-channel capacitance coupling type plasma jet device and working method

Abstract

The invention provides a multi-channel capacitance coupling type plasma jet device and a working method. The multi-channel capacitance coupling type plasma jet device comprises a gas diversion and mixing structure, a plasma generator, a radio frequency circuit and a gas inlet pipeline, wherein the gas diversion and mixing structure is communicated with the plasma generator through the gas inlet pipeline; the radio frequency circuit is electrically connected with the plasma generator; an anode plate, a cathode plate and an insulating medium plate are mounted in the plasma generator; the insulating medium plate is arranged between the anode plate and the cathode plate and is provided with a plurality of reaction channels. According to the device, the flow of each jet flow unit can be independently controlled, so that the removal function of the linear jet flow can be accurately calculated, regulated and controlled, and the fine and efficient shaping of a complex surface can be realized.

Description

technical field [0001] The invention relates to the design and working method of an atmospheric plasma generating device, in particular to a multi-channel capacitively coupled plasma jet device and a working method. Background technique [0002] Atmospheric plasma processing technology is a new processing method proposed and gradually developed in the 1990s. It is a material removal method of chemical etching. During processing, in the atmospheric environment, some inert gases are ionized to form a plasma state, so that the fluorine-containing reactive gas is excited to form active reactive atoms under this condition, and chemically reacts with the material to be processed to generate gas products to achieve material removal. Atmospheric plasma processing has advantages that other processing methods cannot have at the same time, such as high material removal rate, non-contact processing without subsurface damage, and removal amount can be calculated by theoretical calculatio...

AI Technical Summary

Problems solved by technology

But the weak point of this patent document is: the device can only regulate the area of ​​the jet, so there is no technical problem that can solve the multi-channel jet

However, the disadvantage of this patent document is that this patent focuses on adjusting the array, and there is a problem that multiple sets of anodes and cathodes interfere with each other, and it cannot realize the combination of plasma jets into jet arrays stably and effectively.

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