Sensor element of gas sensor
A sensor element, gas sensor technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of increased binding force of sensor elements, deterioration of rapid temperature rise of sensor elements, peeling of protective layers, etc.
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[0098] Making the formation conditions of the first terminal protection layer (hereinafter referred to as the first layer) 21, the second terminal protection layer (hereinafter referred to as the second layer) 22 and the third terminal protection layer (hereinafter referred to as the third layer) 23 are different Eight types of sensor elements 10 (sample Nos. 1 to 8). Specifically, in all sensor elements 10, the first layer 21, the second layer 22, and the third layer 23 are all made of alumina, and the porosity of the first layer 21 and the second layer 22 and the length of the first layer Combinations of L1, second layer length L2, and third layer length L3 are different. In addition, the porosity of the third layer 23 was set at 25%, and the thicknesses of the first layer 21, the second layer 22, and the third layer 23 were set at 40 μm, 500 μm, and 200 μm, respectively.
[0099] Table 1 below lists the porosity, the first layer length L1 , the second layer length L2 , and...
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