Precise liquid preparation equipment for cleaning graphite boat

Abstract

The invention provides precise liquid preparation equipment for cleaning a graphite boat. The precise liquid preparation equipment comprises a cleaning tank group and a liquid preparation mechanism; the cleaning tank group comprises a support frame, a cleaning tank and a pipeline; and the liquid preparation mechanism comprises a raw material pipe, a mixing pipe and a pumping mechanism. The amount and the concentration of the required cleaning liquid can be configured according to the number and the use degree of the cleaned graphite boats, so that the cleaning cost is reduced while the cleaning efficiency is ensured. An innovative liquid preparation mechanism is arranged, magnetic attraction force generated by the electricity-to-magnetism principle is matched with a pumping spring, the existing manual configuration and piston pumping modes are effectively replaced, meanwhile, liquid preparation raw materials in all raw material pipes are accurately pumped, and the cleaning quality of cleaning liquid is guaranteed. Dilution pipelines are further arranged between cleaning tanks and can be used for diluting cleaning liquid flowing into next-stage cleaning tanks, so that it is guaranteed that various parts can be cleaned separately after the graphite boat is disassembled, and the pertinence is higher. The structure is novel, production and manufacturing are convenient, and good practicability and market prospects are achieved.

Description

technical field [0001] The invention belongs to the field of photovoltaic technology, and in particular relates to a precise liquid dosing device for cleaning graphite boats. Background technique [0002] The graphite boat is a graphite mold, which itself is a kind of carrier, which can put the raw materials and parts we need to position or shape together in it for high-temperature sintering. [0003] Graphite boats are made of artificial graphite through mechanical processing. All graphite and carbon-carbon composite materials are characterized by: low impurity content, high purity and high corrosion resistance, stable physical and chemical properties, high strength at high temperatures, and strong sputtering resistance. Moderate electrical conductivity, high thermal conductivity. Generally, the graphite boat should be cleaned after 100 to 120 times of operation. After the number of times reaches, the silicon wafer will turn red. This is because the SiN on the boat will in...

AI Technical Summary

Problems solved by technology

[0004] In order to ensure that the fine impurities in each process node in the graphite boat can be cleaned up, the graphite boat needs to be disassembled in the existing process. In order to ensure the cleaning quality of the graphite boat and save the cleaning cost, the cleaning solution needs to be separated according to the cleaning quantity. Configuration, the cleaning fluid used in the existing process is mostly configured in advance

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