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Spatial light field amplitude and phase composite modulation system and method, and detection system thereof

A technology of spatial light modulator and spatial light field, which is applied in the direction of optical instrument testing, optics, and measuring devices, can solve the problem of low lithography resolution, achieve enhanced lithography resolution, reduce lithography pattern distortion, Effect of Improving Lithography Efficiency

Pending Publication Date: 2021-11-19
JINAN UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to overcome the disadvantages of only spatially modulating the single information amplitude or phase of the light field described in the above-mentioned prior art, and the lithography resolution is low, the present invention provides a spatial light field amplitude and phase complex modulation system, a space Optical field amplitude and phase compound modulation method, and a detection system for real-time detection of amplitude and phase

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  • Spatial light field amplitude and phase composite modulation system and method, and detection system thereof
  • Spatial light field amplitude and phase composite modulation system and method, and detection system thereof
  • Spatial light field amplitude and phase composite modulation system and method, and detection system thereof

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Embodiment 1

[0049] This embodiment proposes a spatial light field amplitude and phase composite modulation system, such as figure 1 Shown is a structural diagram of the spatial light field amplitude and phase complex modulation system of this embodiment.

[0050] In the spatial light field amplitude and phase composite modulation system proposed in this embodiment, it includes:

[0051] An amplitude-type spatial light modulator 1, configured to perform pixelated amplitude modulation on the input light field;

[0052] The pixel matching optical system 2 is used to adjust the position of the image light field amplitude-modulated by the amplitude-type spatial light modulator 1, so that the image light field is consistent with the spatial pixel position in the phase-type spatial light modulator 3 One-to-one correspondence, and then input into the phase-type spatial light modulator 3;

[0053] The phase-type spatial light modulator 3 is used for phase-modulating the corresponding pixels in t...

Embodiment 2

[0067] This embodiment proposes a detection system, which is applied to the spatial light field amplitude and phase composite modulation system proposed in Embodiment 1. like Figure 5 Shown is the optical path diagram of the detection system of this embodiment.

[0068] The detection system proposed in this embodiment includes an imaging system 7 , a mirror 8 , a second beam splitter 9 , a photosensitive device 10 , and a delay system 11 .

[0069] Further, the spatial light field amplitude and phase recombination modulation system of this embodiment further includes a first beam splitter 6 and a beam splitter 5 . Wherein, the dichroic prism 5 is used to split the light field passing through the pixel matching optical system 2 and reflect it to the phase spatial light modulator 3 , the first beam splitter 6 and the delay system 11 respectively. The first beam splitter 6 is used to output the incident modulated light field and reflect it to the detection system for real-time...

Embodiment 3

[0079] This embodiment proposes a spatial light field amplitude and phase composite modulation method, which is applied to the spatial light field amplitude and phase composite modulation system proposed in Embodiment 1. like Figure 9 Shown is a flow chart of the spatial light field amplitude and phase composite modulation method of this embodiment.

[0080] The spatial light field amplitude and phase complex modulation method proposed in this embodiment includes the following steps:

[0081] S1. Perform pixelated amplitude modulation on the incident homogenized parallel light field through the amplitude-type spatial light modulator 1 to obtain an amplitude-modulated image light field;

[0082] S2. Input the amplitude-modulated image light field into the pixel matching optical system 2, and the pixel matching optical system 2 corresponds the spatial pixel positions of the image light field with the pixel positions of the phase-type spatial light modulator 3 one by one, Then...

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Abstract

The invention provides a spatial light field amplitude and phase composite modulation system and method, and a detection system thereof in order to overcome the defects that only single information amplitude or phase of a light field is spatially modulated by spatial light modulation, and the photoetching resolution is low. The spatial light field amplitude and phase composite modulation system comprises an amplitude type spatial light modulator, a pixel matching optical system and a phase type spatial light modulator, the amplitude type spatial light modulator carries out pixelated amplitude modulation on an input light field, and then the pixel matching optical system carries out position adjustment on an image light field to make the image light field in one-to-one correspondence with spatial pixel positions in the phase-type spatial light modulator, then the image light field is input into the phase-type spatial light modulator, the phase-type spatial light modulator performs phase modulation on corresponding pixels in the input image light field subjected to amplitude modulation, and the output light field is a patterned light field of which the phase and the amplitude are independently modulated, so pixelization, multi-degree-of-freedom and independent modulation of amplitude and phase information of a space light field is realized.

Description

technical field [0001] The present invention relates to the technical field of light field composite modulation, and more specifically, to a spatial light field amplitude and phase composite modulation system, method and detection system thereof. Background technique [0002] The maskless projection lithography technology based on the spatial light modulator is a hotspot in the research of the next generation of new lithography technology. Using the spatial light modulator to replace the traditional physical mask plate saves the expensive mask in traditional lithography. It can also realize multi-dimensional parallel processing in space, which greatly improves the processing efficiency and quality, and also reduces the time and cost of chip or device tape-out. There are currently three main types of spatial light modulators used in lithography: the first is microLED arrays, which use self-illuminating micron-scale LEDs as light-emitting pixel units and assemble them on the d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G02F1/01G01M11/00
CPCG03F7/70308G02F1/0102G01M11/00
Inventor 赵圆圆吴志财陈经涛段宣明
Owner JINAN UNIVERSITY
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