High-sensitivity micro-pressure detection capacitive micro-mechanical ultrasonic transducer with inverted-cone-shaped cavity structure
An ultrasonic transducer, high-sensitivity technology, applied in the direction of the fluid using vibration, to achieve the effects of increased sensitivity, reduced average height, and high-sensitivity pressure detection
Active Publication Date: 2021-11-30
ZHONGBEI UNIV
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Problems solved by technology
The Si diaphragm of the traditional capacitive micromachined ultrasonic transducer is a flat diaphragm. The diaphragm and the cylindrical cavity structure severely limit the deformation of the diaphragm and inhibit the further optimization of pressure measurement performance.
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[0026] Such as figure 2 As shown, it is the high-sensitivity micro-pressure detection inverted mesa-shaped cavity structure capacitive micro-machined ultrasonic transducer according to the present invention, and its overall structure includes a metal upper electrode 1, a Si diaphragm 2, a SiO 2 Support column 3, vacuum chamber 4, SiO 2 Insulating layer 5 and low-resistivity silicon substrate (as the lower electrode); specific preparation process: first, the prepared SOI wafer and high-quality Si wafer are cleaned by RCA to remove surface insoluble pollutants; then, photolithography is used to and wet etching process to define the shape and depth of the mesa-shaped cavity on the high-quality Si wafer, and then form a silicon dioxide insulating layer through dry oxygen oxidation; secondly, after bonding the SOI and the processed Si wafer, dry The buried oxide layer and the substrate of SOI are removed by the method and wet etching process, thereby releasing the top silicon to ...
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Abstract
The invention relates to the field of micro-pressure (0-10kPa) detection, and particularly relates to an MEMS or capacitive micro-mechanical ultrasonic transducer, in particular to a high-sensitivity micro-pressure detection capacitive micro-mechanical ultrasonic transducer with an inverted-cone-shaped cavity structure. The capacitive micro-mechanical ultrasonic transducer comprises a metal upper electrode, a Si vibrating diaphragm, a SiO2 supporting column, a vacuum cavity, a SiO2 insulating layer and a silicon substrate, and the annular SiO2 supporting column is arranged at the edge of the lower portion of the Si vibrating diaphragm. The silicon substrate is arranged below the SiO2 supporting column, the vacuum cavity defined by the Si vibrating diaphragm, the SiO2 supporting column and the silicon substrate is a a vacuum cavity in an inverted circular truncated cone shape, the SiO2 insulating layer is arranged at the bottom of the vacuum cavity, and the metal upper electrode is sputtered above the Si vibrating diaphragm. The capacitive micro-mechanical ultrasonic transducer has the pressure detection performance of high sensitivity and excellent linearity.
Description
technical field [0001] The invention relates to the field of micro-pressure (0-10kPa) detection, in particular to a MEMS or capacitive micro-machined ultrasonic transducer, in particular to a capacitive micro-machined ultrasonic transducer with an inverted table-shaped cavity structure for high-sensitivity micro-pressure detection. Background technique [0002] Pressure is the most basic application parameter, and its precise measurement is an urgent technical problem in the fields of industrial production, scientific research, national defense technology, and biomedicine. Especially in the micro-pressure environment, efficiently and accurately obtaining weak pressure is always one of the key technologies and difficulties in the design of pressure sensors; coupled with complex situations such as sudden pressure changes, it is necessary to design a practical sensor with high sensitivity and low detection. It is quite difficult. Nevertheless, micro-pressure sensors have alway...
Claims
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Login to View More IPC IPC(8): B06B1/02
CPCB06B1/02
Inventor 王红亮丁琦何常德张文栋黄霄王任鑫王智豪
Owner ZHONGBEI UNIV