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Microcavity optical frequency comb gas concentration sensing measurement method

A technology of gas concentration and sensing measurement, which is applied in the direction of color/spectral characteristic measurement, measuring device, neural learning method, etc. It can solve the problems of monotonous measurement methods and limited measurement of gas samples, so as to enrich the sensing dimension and improve the sensing performance. Sensitivity and noise tolerance, and the effect of improving sensing sensitivity

Active Publication Date: 2022-01-11
ZHEJIANG UNIV OF TECH
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Problems solved by technology

[0005] In summary, microcavity optical frequency comb measurement has the advantages of broadband and high frequency resolution, but it is currently limited to measuring the absorption spectrum of gas samples, and the measurement method is monotonous; in traditional microcavity sensing, the sample interacts with the microcavity mode field. Has high sensitivity, but only limited to a single or a limited number of modes for detection

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  • Microcavity optical frequency comb gas concentration sensing measurement method
  • Microcavity optical frequency comb gas concentration sensing measurement method
  • Microcavity optical frequency comb gas concentration sensing measurement method

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Embodiment

[0037] In the embodiment of the present invention, a silicon substrate SiO is proposed 2 Si 3 N 4 Film to study microcavity optical frequency comb, which is shown in Table 1.

[0038] Table 1: Microcal resonance cavity parameters of microcapheric comb

[0039]

[0040] The microcarronic cavity structure of the microcomputer optical frequency comb figure 1 As shown, the response type detected sensing, the light field is limited to the resonant cavity, but some energy is still leaked into the environment by the deserted field, when the material is tested is close to the ecch of the microcavity and enters the faded field After the interaction with the deceased, the micro-ring waveguide will result in a variation of the effective refractive index, which in turn leads to dissipation rate κ for optical comb comb. α Change, causing the optical comb tooth energy value change. The optical comb variations and sensing targets are complex nonlinear mapping relationships, and the application...

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Abstract

The invention relates to a microcavity optical frequency comb gas concentration sensing measurement method. The method comprises the following steps: (1) collecting training data; (2) training a DNN neural network sensing data detection model; (3) collecting test data; (4), testing a DNN neural network sensing data detection model; the optical frequency comb sensing method for researching microcavity enhancement is provided by combining the characteristic of ultrahigh sensitivity of microcavity sensing and the advantage of broadband high frequency resolution of an optical frequency comb spectrum; meanwhile, multi-mode sensing information is effectively fused with the help of a machine learning intelligent algorithm, and sensing measurement is achieved; according to the method, gas is sampled and introduced into the microcavity optical frequency comb to enhance interaction between light and substances, the sensing sensitivity is improved, sensing measurement is carried out by adopting methods such as machine learning according to a complex nonlinear sensing mechanism, sensing information of comb teeth of a plurality of frequency combs is integrated, and the sensing sensitivity and the noise tolerance capability are improved.

Description

Technical field [0001] The present invention belongs to the field of echo wall optical microcavity sensing technology, and more particularly to a microcavity optical comb gas concentration sensing measurement method. Background technique [0002] The optical comb technology has been revolutionized for spectroscopy, especially the molecular spectroscopy. A optical frequency comb can illuminate samples with high frequency stability broadband laser lines, each of which can be obtained by low probe array techniques, and this method can obtain high measurement accuracy of the normal spectrometer. In this way, it can be detected in any small change in the spectrum, such as molecular vibration harmonics. A better detection effect can be obtained for the frequency combing source of the medium infrared, as the molecular vibration feature is more intense. In the middle of the infrared optical frequency comb has been confirmed to detect a gaseous concentration of billion. [0003] Recently,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/31G01N21/01G06N3/04G06N3/08
CPCG01N21/31G01N21/01G06N3/08G01N2021/0112G06N3/045Y02A50/20
Inventor 夏炅林程浩卢瑾任宏亮李明邹长铃乐孜纯
Owner ZHEJIANG UNIV OF TECH
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