Microcavity optical frequency comb gas concentration sensing measurement method
A technology of gas concentration and sensing measurement, which is applied in the direction of color/spectral characteristic measurement, measuring device, neural learning method, etc. It can solve the problems of monotonous measurement methods and limited measurement of gas samples, so as to enrich the sensing dimension and improve the sensing performance. Sensitivity and noise tolerance, and the effect of improving sensing sensitivity
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[0037] In the embodiment of the present invention, a silicon substrate SiO is proposed 2 Si 3 N 4 Film to study microcavity optical frequency comb, which is shown in Table 1.
[0038] Table 1: Microcal resonance cavity parameters of microcapheric comb
[0039]
[0040] The microcarronic cavity structure of the microcomputer optical frequency comb figure 1 As shown, the response type detected sensing, the light field is limited to the resonant cavity, but some energy is still leaked into the environment by the deserted field, when the material is tested is close to the ecch of the microcavity and enters the faded field After the interaction with the deceased, the micro-ring waveguide will result in a variation of the effective refractive index, which in turn leads to dissipation rate κ for optical comb comb. α Change, causing the optical comb tooth energy value change. The optical comb variations and sensing targets are complex nonlinear mapping relationships, and the application...
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