Trace gas detection equipment testing tool and sample preparation method
A technology for testing tooling and testing equipment, applied in the preparation of test samples, measuring devices, analyzing gas mixtures, etc. Working conditions, etc.
Pending Publication Date: 2022-01-21
奕瑞影像科技成都有限公司
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[0004] The solutions in the prior art can meet the performance evaluation and calibration of gas chromatographs, ion mobility spectrometers, non-dispersive infrared spectrometers, micro-cantilever detectors, photoion gas detectors and mass spectrometers working in normal pressure scenarios, but However, it is difficult to meet the performance evaluation and calibration of the residual gas analysis mass spectrometer working in a vacuum state, and it is also impossible to directly observe the working conditions of the residual gas analysis mass spectrometry ionization filament
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[0041] see Figure 1 to Figure 2 . It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for those who are familiar with this technology to understand and read, and are not used to limit the implementation of the present invention. Limiting conditions, so there is no technical substantive meaning, any modification of structure, change of proportional relationship or adjustment of size, without affecting the effect and purpose of the present invention, should still fall within the scope of the present invention. The disclosed technical content must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description and are not used to limit this specification. The practicable scope of the invention and the change or adjustment of...
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The invention provides a trace gas detection equipment test tool and a sample preparation method. The test tool comprises a test board, a sample cavity, a gas path system and a vacuum pump set, wherein the sample cavity is provided with a vacuum gauge and a first solenoid valve, and two sides of the sample cavity are connected with test equipment; the gas path system comprises a sample gas channel, a diluent gas channel, an exhaust channel and a leak sampling channel which are connected in parallel; sample introduction electromagnetic valves are arranged on the sample gas channel and the diluent gas channel, and input ends of the sample introduction electromagnetic valves are correspondingly connected with a standard concentration sample gas source and a standard concentration diluent gas source respectively; the exhaust channel is connected with the sample cavity through an exhaust electromagnetic valve; a leak hole channel is connected with the sample cavity through a leak hole electromagnetic valve; and the vacuum pump set is connected with the first electromagnetic valve. The test tool provided by the invention can meet performance evaluation and calibration of test equipment in a normal pressure environment, and can provide trace concentration samples and test environments meeting sensitivity, quantitative curve and calibration test of a residual gas analyzer in vacuum and high vacuum.
Description
technical field [0001] The invention belongs to the technical field of trace gas detection, in particular to a trace gas detection equipment testing tool and a sample preparation method. Background technique [0002] Gas chromatographs, ion mobility spectrometers, non-dispersive infrared spectrometers, micro-cantilever detectors, photoion gas detectors and mass spectrometers have ppm-ppt level detection sensitivity, and are widely used in environmental gas samples and process equipment gases. Online Monitoring. During the development, delivery and even use of the instrument, it is necessary to evaluate or calibrate the detection sensitivity and quantitative ability of the instrument on a regular or irregular basis to ensure the effectiveness and safety of industrial production and various tests. [0003] The existing detection or calibration methods mainly include: (1) Use a permeation tube to generate a relatively constant concentration of volatile calibration / calibration ...
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IPC IPC(8): G01N33/00G01N1/28
CPCG01N33/007G01N1/28G01N2001/2893G01N33/0072
Inventor 朱伟平黄翌敏
Owner 奕瑞影像科技成都有限公司