The invention discloses an in-plane biaxial piezoresistive acceleration sensor
chip and a preparation method thereof. A
chip is made of an SOI
silicon wafer, and comprises a
chip outer frame. A fixingisland is arranged in the middle of each side of the chip outer frame, a supporting beam is of an L-shaped structure, one end of a long section of the supporting beam is fixed to the chip outer framethrough the fixing islands, the other short section of the supporting beam is sequentially connected with an extending beam and a
mass block, and a sensitive piezoresistive micro beam is arranged ina gap between the
tail end of the extending beam and the fixing islands. All the eight
mass blocks are connected through hinge beams to be square. A piezoresistor on the sensitive piezoresistive
microbeam is connected with a bonding pad through a
metal lead to form a Wheatstone full-
bridge circuit. The extension beam is used as an
intermediate structure for connecting the sensitive piezoresistivemicro-beam, the support beam and the
mass blocks, and transmits the change of the motion state of the mass blocks to the sensitive piezoresistive micro-beam. According to the piezoresistive acceleration sensor chip, the supporting element and the sensitive element are separated, the dynamic performance and the application range of the piezoresistive acceleration sensor are improved, the preparation method is simple, and the reliability is high.