Room-temperature high-frequency terahertz wave detector and preparation method thereof

Abstract

The invention relates to a room-temperature high-frequency terahertz wave detector and a preparation method thereof, which belong to the technical field of terahertz wave detection research. The room-temperature high-frequency terahertz wave detector comprises a high carrier migration two-dimensional material, a field effect transistor and a terahertz antenna, wherein the field effect transistor comprises a source electrode, a gate electrode and a drain electrode, the source electrode, the gate electrode and the drain electrode are integrated on a substrate with a dielectric layer, and a terahertz antenna is connected with the three electrodes of the field effect transistor; the upper surface and the lower surface of the high carrier mobility two-dimensional material are respectively coated with a two-dimensional layered dielectric material; and terahertz antenna ends connected with the drain electrode and the source electrode are in ohmic contact with the high carrier mobility two-dimensional material, and the terahertz antenna end connected with the gate electrode is in Schottky contact with the high carrier mobility two-dimensional material by means of the two-dimensional layered dielectric material. The room-temperature high-frequency terahertz wave detector effectively couples the high-frequency terahertz waves, avoids the problem that the carrier mobility is reduced whenthe high carrier mobility two-dimensional material is prepared, and achieves effective detection of the high-frequency terahertz waves.

Description

technical field [0001] The invention relates to a room-temperature high-frequency terahertz wave detector and a preparation method thereof, belonging to the technical field of terahertz wave detection research. Background technique [0002] Terahertz (Terahertz) radiation usually refers to electromagnetic waves with a wavelength of 30 μm to 3 mm (0.1 THz to 10 THz), between millimeter waves and infrared waves, and is in the transition zone from electricity to photonics, macroscopic classical theory to microscopic quantum theory . Terahertz waves have the characteristics of high frequency and short pulse time (on the order of picoseconds), so they have high spatial and temporal resolution, and are widely used in terahertz imaging and terahertz spectroscopy. In addition, due to its special properties, such as high transmittance, low energy, fingerprint characteristics and high frequency and high bandwidth characteristics, it is widely used in non-destructive testing, safety t...

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Problems solved by technology

[0004] The mainstream terahertz antenna structure designed and used at this stage is concentrated in the 0.1-1THz frequency band (bowie antenna, logarithmic periodic scalloped antenna, etc.), lacking the design of the 2-5THz high-frequency terahertz antenna structure, which cannot effectively couple high-frequency Hertz band

The interface problems and scattering centers introduced by the preparation process have greatly reduced the carrier mobility of high-mobility two-dimensional materials used for terahertz detection, and cannot effectively utilize their high-mobility characteristics, thus making it impossible to achieve high-sensitivity, high-frequency Terahertz detection

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