7.6-micron front cut-off infrared optical filter and making method thereof

An infrared filter and the technology of its manufacturing method, which are applied in the field of 7.6 micron front-cut infrared filter and its manufacture, can solve the problems of poor precision and low signal-to-noise ratio, achieve high precision and sensitivity, excellent performance, and stable process mature effect

Inactive Publication Date: 2012-07-04
MULTI IR OPTOELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the 7.6 micron front-cut infrared filter provided by the prior art has low signal-to-noise ratio and poor precision, which cannot meet the needs of market development.

Method used

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  • 7.6-micron front cut-off infrared optical filter and making method thereof
  • 7.6-micron front cut-off infrared optical filter and making method thereof
  • 7.6-micron front cut-off infrared optical filter and making method thereof

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Embodiment 1

[0021] A kind of 7.6 micron front cut-off infrared filter that present embodiment provides, its structure is:

[0022] (1) Single-crystal germanium Ge with a size of Φ25.4×1.0mm is used as the substrate, the surface aperture N≤5, the local aperture ΔN≤0.5, the parallelism θ≤1’, and the surface finish is better than 60 / 40;

[0023] (2) Zinc sulfide ZnS and single crystal germanium Ge are selected as the coating material, and multi-layer interference films are deposited on the two surfaces of the single crystal germanium Ge substrate;

[0024] (3) Sub|2.42(.5HL.5H) is used for the design of the first film film system 8 3.0 (.5HL.5H) 7 |Air;

[0025] The film system design of the second surface adopts Sub|1.2(.5HL.5H) 6 1.6(.5HL.5H) 7 2.32(.5HL.5H) 6 |Air;

[0026] The corresponding meanings in the film system are: Sub is substrate, Air is air, H is λc / 4 single crystal germanium film layer, L is λc / 4 zinc sulfide film layer, λc=2μm, 2.42, 1.2 and other numbers in the struct...

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Abstract

The invention discloses a 7.6-micron front cut-off infrared optical filter and a making method thereof. The optical filter is characterized in that: single crystal germanium (Ge) with the size of phi 25.4*1.0mm is used as a substrate, the surface aperture N of the substrate is less than or equal to 5, the local aperture delta N is less than or equal to 0.5, the parallelism theta is less than or equal to 1', and the surface finishment is superior to 60/40; zinc sulfide (ZnS) and single crystal germanium (Ge) are used as coating materials, and a plurality of layers of interference films are respectively deposited on two surfaces of the single crystal Ge substrate; Sub absolute value 2.42(0.5HL0.5H)<8>3.0(0.5HL0.5H)<7> Air is adopted in the design of a first side film system; Sub absolute value 1.2(0.5HL0.5H)<6>1.6(0.5HL0.5H)<7>2.32(0.5HL0.5H)<6> Air is adopted in the design of a second side film system; according to the adopted evaporation process conditions, heating and baking of below 300 DEG C are performed in a vacuum environment with the vacuum degree of less than or equal to 10<-3>Pa, and a physical vapor deposition mode and ion source aided coating are adopted; and the 7.6-micron front cut-off infrared optical filter has excellent signal-to-noise ratio and good background interference suppression. The optical filter can be widely used for detecting the temperature of a far infrared object.

Description

technical field [0001] The invention relates to a production technology of an infrared filter, in particular to a 7.6-micron front-cut infrared filter and a manufacturing method thereof Background technique [0002] The principle of infrared detection is to convert the radiant energy of the infrared rays emitted by the measured object into electrical signals. The magnitude of the infrared radiation energy is related to the temperature of the object itself, and the temperature of the object can be determined according to the magnitude of the converted electrical signal. All objects above absolute zero radiate infrared light by themselves. [0003] The instrument used to test the temperature of objects in the far-infrared band is called a far-infrared thermometer. The infrared radiation characteristics of an object are closely related to its indicated temperature. Therefore, the surface of the object can be accurately measured by accurately measuring the infrared energy radia...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28G02B1/10B32B9/04B32B15/00C23C14/54C23C14/06C23C14/14
Inventor 吕晶
Owner MULTI IR OPTOELECTRONICS
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