Tunable pressure sensor with elliptical equilateral triangle resonant cavity embedded therein

Abstract

The invention discloses a tunable pressure sensor with an elliptical equilateral triangle resonant cavity embedded therein, and belongs to the technical field of micro-nano photoelectrons. The pressure sensor is composed of a substrate layer (1), a rectangular metal layer (2), a straight waveguide (3), the equilateral triangle resonant cavity (4) and an oval metal block (5), wherein the substrate layer (1) is located at the lowest end, the rectangular metal layer (2) and the straight waveguide (3) are sequentially arranged next to each other and tightly attached to the upper portion of the substrate layer (1), the equilateral triangle resonant cavity (4) is located on the rectangular metal layer (2), the oval metal block (5) is located on the equilateral triangle resonant cavity (4), and the circle center of the oval metal block (5) coincides with the gravity center of the equilateral triangle resonant cavity (4). The tunable pressure sensor with the elliptical equilateral triangle resonant cavity embedded therein has the technical advantages of simple structure, small size, tunable sensing characteristic and high sensitivity.

Description

technical field [0001] The invention discloses an equilateral triangular resonant cavity tunable pressure sensor embedded with an ellipse, which belongs to the technical field of micro-nano optoelectronics. Background technique [0002] Surface plasmon is a kind of electromagnetic evanescent wave that propagates along the interface between metal and dielectric and decays exponentially in the direction perpendicular to the interface. It has the performance of breaking through the traditional diffraction limit and electric field constraints. [0003] As a typical waveguide structure based on surface plasmons, the metal-dielectric-metal structure has the characteristics of high light confinement and easy fabrication. Therefore, the metal-dielectric-metal structure based on surface plasmons has been applied in different photon Components, such as optical switches, wavelength division multiplexers, filters, etc. [0004] At present, different metal-medium-metal structure sensors...

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Problems solved by technology

[0004] At present, different metal-medium-metal structure sensors based on surface plasmons are designed to sense the concentration of the surrounding medium, ambient temperature and refractive index changes, and based on this, a sensor with high sensitivity and quality factor is designed, If it is used for pressure sensing, it can break through the traditional pressure sensor's complex structure, large volume, and untunable measurement range, which affect its application range.

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