Compensation processing method of diffractive optical element
A diffractive optical element and processing method technology, applied in metal processing equipment, metal processing machinery parts, manufacturing tools, etc., can solve problems such as low precision and inability to perform compensation processing, so as to improve processing accuracy and efficiency, and reduce surface error small effect
Pending Publication Date: 2022-03-01
西安应用光学研究所
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[0006] The purpose of the present invention is to provide an ultra-precise compensating processing method that can realize the controllability of the diamond turning processing precision of the diffractive optical element in view of the problem that the existing diamond turning diffractive optical element cannot be compensated and the precision is low. Ultra-precision diamond lathe and surface profiler for processing diffractive surface optical elements
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[0023] In order to make the purpose, content, and advantages of the present invention clearer, the specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0024] figure 1 It is a process flow chart of the present invention, which is a cyclic process of gradually reducing the surface shape error and a process of "processing-detection-processing". This process forms a complete closed-loop control of CNC machining until the design accuracy requirements are met. Precise manufacturing of diffractive optical elements can thus be achieved.
[0025] refer to figure 1 As shown, the main process flow of the present invention includes: the processing and calculation of the detection data of the diffractive optical element, the calculation of the residual error of the surface shape, the compensation of the tool, and the design of the tool compensation path. The specific implementat...
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The invention belongs to the technical field of ultra-precision manufacturing of diffractive optical parts, and discloses a compensation processing method of a diffractive optical element, which comprises the following steps of: firstly, carrying out diamond turning processing on the diffractive optical parts, and carrying out surface shape contour detection by utilizing a contact type contourgraph to obtain surface shape detection data of the surfaces of the parts; data processing and fitting are conducted on detection data according to a theoretical equation of the diffractive optical part, error data of the surface shape of the diffractive optical surface are obtained, and then a diamond tool compensation machining path is calculated on the basis of the data, the theoretical equation and the technical parameters of the diamond turning tool. According to the method, the problems of high precision and high efficiency of the diffractive optical part with the aspheric substrate turned by the diamond are completely solved.
Description
technical field [0001] The invention belongs to the technical field of ultra-precision manufacturing of optical parts, and relates to a compensating processing method of diffractive optical elements. Background technique [0002] Diffractive optical elements have the following advantages that traditional lenses cannot match: 1) High diffraction efficiency, which can greatly improve the utilization of light energy and enhance the contrast of the system, thereby increasing the working distance of the system; 2) Combined with refractive lenses to form a hybrid optical system It can correct chromatic aberration and spherical aberration; 3) It produces an optical wavefront that is difficult to achieve with general optical components, and has the characteristics of large field of view, anti-reflection and polarization, which is conducive to the miniaturization, integration and intelligent design of the system. Therefore, crystal material diffractive optical elements represented by...
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Login to View More IPC IPC(8): B23B5/00B23Q17/20
CPCB23B5/00B23Q17/20
Inventor 张峰汪志斌张云龙郭小岗郭芮苏瑛张瑜许增奇王阜超杨硕
Owner 西安应用光学研究所