Micro-nano porous throttling static pressure air flotation cylindrical bearing

Abstract

The invention discloses a micro-nano porous throttling static pressure air flotation cylindrical bearing device which is characterized in that a plurality of micro-nano porous throttlers are distributed on the inner surface of an air flotation cylindrical bearing, namely, a single row or multiple rows of micro-nano porous throttlers are distributed on the inner surface of the air flotation cylindrical bearing, and a plurality of micro-nano porous throttlers are uniformly distributed in the circumferential direction of each row. The micro-nano porous throttler is of a sheet structure, the thickness ranges from 0.1 mm to 10 mm, the diameter ranges from 1 mm to 100 mm, micro-nano pores are formed in the sheet structure, the pores with different diameters can be freely combined according to design (micron-scale and nano-scale porous combination or micron-scale and nano-scale mixed porous combination), and reasonable layout is carried out through optimization. The stability and the mechanical property of the air floatation cylindrical bearing can be remarkably improved, and the self-excited vibration of the air floatation cylindrical bearing can be effectively reduced. The micro-nano porous throttling static pressure air floatation cylindrical bearing has the advantages of high speed, high precision and the like, and is particularly suitable for the fields of ultra-precise semiconductor equipment, micro / nano electromechanical systems and the like.

Description

technical field [0001] The invention relates to a micro-nano porous throttling static pressure air-floating cylindrical bearing, which can significantly improve the stability of the air-floating cylindrical bearing, and at the same time reduce the self-excited vibration of the air-floating cylindrical bearing, and is mainly used in the fields of integrated circuit manufacturing and precision optics. . Background technique [0002] Air-bearing cylindrical bearings have the advantages of high speed, high precision, no friction and heating, and ultra-clean, and are widely used in micro-nano processing and manufacturing. However, gas bearings have problems such as low bearing capacity, weak stiffness and micro-vibration: on the one hand, the micro-vibration caused by the turbulent flow of high-speed gas will affect the dynamic characteristics of the ultra-precision motion system; on the other hand, the traditional air bearing has weak damping, It is difficult to quickly attenua...

AI Technical Summary

Problems solved by technology

However, gas bearings have problems such as low bearing capacity, weak stiffness and micro-vibration: on the one hand, the micro-vibration caused by the turbulent flow of high-speed gas will affect the dynamic characteristics of the ultra-precision motion system; on the other hand, the traditional air bearing has weak damping, Difficult to quickly attenuate external disturbances

However, as the requirements for ultra-precision machining and ultra-precise positioning become more and more stringent, the turbulent self-excited vibration in small hole throttling gradually restricts the improvement of ultra-compact machining and ultra-precision positioning

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