Integrated circuit failure positioning system and method based on continuous laser source

Abstract

The invention discloses an integrated circuit failure positioning system and method based on a continuous laser source, and the method comprises the steps: irradiating a to-be-detected circuit sample based on an infrared laser, and obtaining the scanning data of the to-be-detected circuit sample; photographing the to-be-detected circuit sample based on an infrared camera to obtain a circuit layout diagram; and comparing the scanning data with the circuit layout diagram to obtain a failure positioning point. According to the method, the failure point positioning problem of the resistive failure of the integrated circuit is solved, and accurate and rapid positioning of the resistive failure of the integrated circuit and transistor grid damage is realized. The test efficiency and the positioning precision of integrated circuit failure positioning are improved, and technical support is provided for research of integrated circuit failure analysis.

Description

Technical field [0001] The present invention belongs to the field of integrated circuit failure, in particular, to an integrated circuit failure positioning system and method based on a continuous laser source. Background technique [0002] Modern integrated circuits have a very broad application. For integrated circuits, it is important to ensure that it is very important for long-term stability. The standard, which is measured, called the reliability of the integrated circuit. The reliability is high, and most of them depends on the manufacturing quality of the integrated circuit. In modern integrated circuit manufacturing techniques, the manufacture of chips requires a series of process, each process, may introduce different defects in chips. The existence of defects does not necessarily lead to direct damage to the chip, and more likely to fail in a certain or several specific units. In the wafer test and package test phase of the chip, the failure of the failure of the fault...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of resistive failure and transistor gate damage that are difficult to locate, the present invention provides the following solution: an integrated circuit failure location system and method based on a continuous laser source, including:

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