Device and method for detecting low-frequency-band aberration in optical free-form surface

Abstract

The invention discloses a device and a method for detecting low-frequency band aberration in an optical free-form surface, relates to the technical field of optical free-form surface detection, adopts a method for detecting the low-frequency band aberration in the optical free-form surface based on transverse translation difference phase recovery, and designs a system for detecting the low-frequency band aberration in the optical free-form surface, which gives consideration to high precision and large measurement range. The objective of the invention is to solve the problem that a conventional interferometer cannot detect non-axisymmetric and non-rotational symmetric free-form surfaces. The surface shape machining of the free-form surface optical element in the grinding stage is guided, and finally technical support is provided for high-precision and high-performance optical free-form surface machining and detection. Comprising a middle-low frequency band aberration detection system, a pupil image monitoring system, a surface shape error reconstruction system and an optical path clamping and adjusting system. The device is assisted by fine adjustment of the high-precision galvanometer, and high-precision measurement of low-frequency band aberration in the whole free-form surface is achieved. The contradiction that the dynamic range and the detection precision cannot be obtained at the same time in free-form surface detection is effectively solved.

Description

technical field [0001] The invention relates to the technical field of optical free-form surface detection, in particular to an optical free-form surface mid-low frequency band aberration detection device and method. Background technique [0002] Due to the powerful ability to correct aberrations and optimize the system structure, the optical free-form surface has gradually become an indispensable key optical component for the rapid development of national defense, aerospace, military and other fields. Its application breadth and production development speed have become a measure of a country One of the important symbols of technological level. However, the high-precision and high-performance requirements for optical free-form surfaces increase the difficulty of processing and testing, especially during the manufacturing process, which is far more complex and difficult than the processing and testing of spherical mirrors: High-precision free-form optical key components The ...

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Problems solved by technology

[0004] The present invention adopts a method based on Transverse Translation DiversityPhase Retrieval (TTDPR) to detect mid- and low-frequency aberrations on optical free-form surfaces, and designs a method for detecting mid- and low-frequency aberrations on optical free-form surfaces that takes into account high precision and a large measurement range. system to solve the problem that traditional interferometers cannot detect non-axisymmetric and non-rotationally symmetric free-form surfaces

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