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Wide-range ionization vacuum gauge tube

A vacuum gauge and wide-range technology, which is applied in the field of wide-range ionization vacuum gauge regulation, can solve the problems of low sensitivity and large outgassing, achieve high sensitivity, extend the measurement range, and solve the effects of large outgassing

Pending Publication Date: 2022-04-15
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] The main purpose of this application is to provide a wide-range ionization vacuum gauge to solve the problems of large outgassing and low sensitivity in the related art

Method used

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Embodiment Construction

[0030] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiment of the application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiment of the application. Obviously, the described embodiment is only It is an embodiment of a part of the application, but not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the scope of protection of this application.

[0031] It should be noted that the terms "first" and "second" in the description and claims of the present application and the above drawings are used to distinguish similar objects, but not necessarily used to describe a specific sequence or sequence. It should be understood that the data so used may be interchanged under appropriate circumstances for...

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Abstract

The invention relates to the technical field of vacuum measurement, in particular to a wide-range ionization vacuum gauge tube, which comprises a cathode, an anode, a collector and a flange assembly, and is characterized in that the cathode is a side cathode and is positioned on the side surface of the anode; the anode is a cage type semi-closed grid mesh, and the collecting electrode is a filament-shaped collecting electrode; electrons emitted by the cathode enter the grid mesh through the grid mesh, and are received by the collector after being oscillated for multiple times in the grid mesh; the flange assembly is a mechanical interface of a vacuum system of the wide-range ionization vacuum gauge tube. According to the wide-range ionization vacuum gauge tube, the influence of gas leakage and gas release of the electrode can be inhibited, and high sensitivity can be achieved.

Description

technical field [0001] The present application relates to the technical field of vacuum measurement, in particular to a wide-range ionization vacuum gauge gauge. Background technique [0002] With the rapid development of science and technology, high-tech fields have put forward higher requirements for ultra-high vacuum measurement, especially in aerospace, high-energy physics, semiconductor wafer manufacturing, surface coating and other high-tech fields, the wide-range ultra-high vacuum measurement put forward more urgent demands. [0003] Ionization gauge usually includes three basic components of cathode, anode and ion collector. The working principle of the ionization gauge is that the electrons are emitted from the cathode and ionize the gas molecules during the reciprocating movement in the anode area, and the gas phase ion flow I generated by the ionization. Received and detected by the collector, the reciprocating electrons are finally received by the anode to form...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L21/32
Inventor 张虎忠李得天成永军孙雯君葛金国孙冬花姚鹏魏建平习振华杨利
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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