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Etching machine

A technology of etching machine and forward and reverse motor, which is applied in discharge tubes, electrical components, circuits, etc., can solve the problems of poor fixed effect of mobile type and inconvenient movement of fixed type, and achieve good fixed effect, easy movement and convenient movement Effect

Pending Publication Date: 2022-05-06
无锡芯汉电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The prior art has the following deficiencies: the existing etching machines are divided into two types, one is fixed and the other is mobile. Designing an etching machine that has a good fixing effect when it needs to be fixed and is easy to move when it needs to be moved is an urgent problem that needs to be solved at present

Method used

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  • Etching machine
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Examples

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Embodiment Construction

[0023] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be implemented in a variety of forms and should not be construed as being limited to the examples set forth herein; On the contrary, providing these example embodiments will make the description of the present disclosure more comprehensive and complete, and fully convey the concept of the example embodiments to those skilled in the art. The drawings are only schematic diagrams of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the figure represent the same or similar parts, so their repeated description will be omitted.

[0024]Further, the described features, structures, or characteristics may be combined in any suitable manner in one or more example embodiments. In the following description, many specific details are provided to give a full understanding of the exemplary embodiments of the pr...

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Abstract

The etching machine comprises a fixed cavity, a hollow cavity is connected to the bottom of the fixed cavity in a penetrating mode, a forward and reverse rotation motor is fixedly arranged in an inner cavity of the hollow cavity, two rotating shafts are arranged at the top of the inner cavity of the fixed cavity, and the end of an output shaft of the forward and reverse rotation motor is in transmission connection with one rotating shaft. Belt wheels and driving gears are fixedly arranged on the peripheral surfaces of the two rotating shafts, a transmission belt is connected between the two belt wheels, and rotating rods are arranged at the four corners of an inner cavity of the fixing cavity. The fixed cavity is supported through the four supporting legs, the stability of the etching machine body is improved, the forward and reverse rotation motor rotates forwards to drive the four rotating rods to rotate, then the movable plate is driven to move downwards, the fixed cavity is jacked up through the four universal wheels, the etching machine body is convenient to move, and the working efficiency is improved. Therefore, the etching machine body can be fixed and moved according to needs, the fixing effect is good, and the movement is convenient.

Description

technical field [0001] The invention relates to the technical field of etching machines, in particular to an etching machine. Background technology [0002] Plasma etching machine is also called plasma etching machine, plasma plane etching machine, plasma etching machine, plasma surface treatment instrument, plasma cleaning system, etc. plasma etching is the most common form of dry etching. Its principle is that the gas exposed to the electron area forms plasma, and the resulting ionized gas and gas composed of releasing high-energy electrons form plasma or ions, When ionized gas atoms accelerate through the electric field, they will release enough force and surface expulsion force to tightly bond the material or etch the surface. To some extent, plasma cleaning is essentially a minor case of plasma etching. The equipment for dry etching process includes reaction chamber, power supply and vacuum part. The workpiece is sent to the reaction chamber evacuated by vacuum pump, and the...

Claims

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Application Information

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IPC IPC(8): H01J37/32H01L21/67
CPCH01J37/32807H01L21/67069H01J2237/334
Inventor 钱强袁鸣
Owner 无锡芯汉电子科技有限公司