High-density C/C-SiC composite material crucible containing alpha-Al2O3 coating

Abstract

The invention relates to a high-density C / C-SiC composite crucible containing an alpha-Al2O3 coating, and belongs to the technical field of thermal field parts for monocrystalline silicon drawing furnaces. The composite material crucible comprises a crucible body and an alpha-Al2O3 coating coated on the inner surface of the crucible body, and the crucible body is a C / C-SiC composite material obtained by sequentially carrying out pyrolytic carbon, resin carbon and silicon carbide densification treatment on a carbon fiber preform through a CVI (Chemical Vapor Infiltration) process, a resin impregnation carbonization process and a reactive infiltration process. The volume density of the carbon fiber preform is 0.3-0.5 g / cm < 3 >, the density of pyrolytic carbon is increased to 1.0-1.2 g / cm < 3 >, the density of resin carbon is increased to 1.4-1.6 g / cm < 3 >, and the density of silicon carbide is increased to 1.8-2.0 g / cm < 3 >. The composite material crucible not only has a supporting effect, but also can ensure the purity of molten silicon and avoid the use of a quartz crucible, the service life of the composite material crucible is remarkably prolonged, the pulling cost of monocrystalline silicon is effectively reduced, and the problem caused by the fact that the quartz crucible and a carbon / carbon composite material crucible must be used at the same time for pulling monocrystalline silicon in the prior art is solved.

Description

technical field [0001] The present invention relates to a kind of containing α-Al 2 o 3 A coated high-density C / C-SiC composite material crucible belongs to the technical field of thermal field components for single crystal silicon drawing furnaces. Background technique [0002] In the process of pulling single crystal silicon, "carbon / carbon composite material crucible + quartz crucible" is generally used at present, such as figure 1 As shown, the quartz crucible is nested in the carbon / carbon composite crucible, the quartz crucible plays the role of carrying the silicon material to ensure the purity of the silicon material, and the carbon / carbon composite material crucible plays the role of carrying the quartz crucible and providing strength support. The temperature in the single crystal silicon drawing furnace is as high as 1500°C. The quartz crucible containing the silicon material will be deformed and softened, and the replacement is very frequent. About 1 piece of ca...

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Problems solved by technology

[0003] Patent CN 102731119 A discloses a carbon / carbon / silicon carbide composite material and its preparation method, which is prepared by performing alternate densification or mixed densification of pyrolytic carbon and silicon carbide on the crucible carbon fiber preform by chemical vapor infiltration method , effectively suppressing the erosion of silicon vapor on the core fibers of carbon / carbon / silicon carbide composite materials, and improving the safety of the thermal field, but the crucible cannot replace the quartz crucible in the single crystal silicon drawing process, and the manufacturing cost is high; Patent CN 113073381 A discloses a crucible with silicon carbide / silicon composite ceramic layer. The carbon composite material crucible has anti-silicide corrosion and anti-oxidation capabilities, and can also be used as a crucible for containing silicon materials, but its preparation process is complicated and the cycle is long

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