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Cleaning system

A cleaning system and cleaning device technology, applied in the field of cleaning systems, can solve the problems of low cleaning efficiency, achieve the effects of ensuring yield, reducing manual work intensity, and improving cleaning efficiency and productivity

Pending Publication Date: 2022-06-17
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the embodiments of the present application is to provide a cleaning system that can at least solve the problem of low cleaning efficiency caused by transferring flower baskets during the entire process of automatic cleaning

Method used

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Embodiment Construction

[0029] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0030] The terms "first", "second" and the like in the description and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances so that the embodiments of the present application can be practiced in sequences other than those illustrated or described herein, and that "first"...

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Abstract

The invention discloses a cleaning system, and relates to the field of semiconductors. A cleaning system comprises a cleaning device and a flower basket. The cleaning device comprises a device body, a supporting assembly and a cleaning assembly. The device body is provided with a process cavity; the supporting assembly comprises a supporting frame arranged in the process cavity, and the flower basket is arranged on the supporting frame; the cleaning assembly comprises a spraying arm, the spraying arm is arranged in the process cavity and corresponds to the flower basket, and the spraying arm is used for spraying a cleaning medium or a drying medium to the flower basket. The problem that the cleaning efficiency is low due to the fact that the flower basket is conveyed in the whole automatic cleaning process can be solved at least.

Description

technical field [0001] The present application belongs to the technical field of semiconductor equipment, and specifically relates to a cleaning system. Background technique [0002] In the semiconductor wafer manufacturing process, a wafer basket needs to be used to carry the wafer, so as to facilitate the process of the wafer. In the process of wafer processing, the wafer basket is in direct contact with the wafer, and the cleanliness of the wafer basket directly affects the yield of the wafer. Therefore, the film basket needs to be cleaned to ensure its cleanliness. In the film basket cleaning device, in order to increase the productivity, the film baskets are usually carried by flower baskets, and multiple film baskets can be cleaned at one time. [0003] At present, the cleaning methods of the film basket are divided into manual cleaning and automatic cleaning. Wherein, the manual cleaning is to manually put the flower baskets with the tablet baskets into the cleanin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/02B08B11/00B08B13/00F26B5/08F26B21/00
CPCB08B3/02B08B13/00B08B11/00F26B21/004F26B5/08B08B2240/00Y02P70/50
Inventor 李广义南建辉
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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