Method for preparing nanoparticles on surface of material by using laser
A nanoparticle and laser technology, applied in nanotechnology and other fields, can solve problems that are rarely applied
Active Publication Date: 2022-07-15
HARBIN INST OF TECH
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Problems solved by technology
Due to the particularity and complexity of the interaction process between short-wave laser and matter, there are few related applications
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[0027] The technical solutions of the present invention will be described in detail below with reference to the accompanying drawings, but the protection scope of the present invention is not limited to the embodiments.
[0028] Equipment and materials used in the present invention:
[0029] Capillary discharge EUV laser with a pulse width of 1.6ns: As a radiation source, the laser excites Ar gas in the capillary with a fast current pulse to obtain a high temperature and high density plasma column, which can output 46.9nm and 69.8nm saturation lasers. In the present invention,
[0030] Parameters of laser cautery:
[0031] The laser works at a wavelength of 46.9 nm and is focused by an uncoated toroidal mirror by grazing incidence reflection. The average energy density of the laser focused by a toroidal mirror at grazing incidence is about 500mJ / cm 2 .
[0032] The irradiation targets were: a glass substrate (target target) with a single-layer graphene on the surface and a ...
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Abstract
The invention discloses a method for preparing nano-particles on the surface of a material by using laser, which relates to the field of preparation of particles on the surface of the material and comprises the following steps: step 1), placing a substrate on a moving platform of a vacuum chamber; a single layer of graphene is arranged on the substrate; (2) a focused capillary discharge extreme ultraviolet laser with the pulse width of 1.6 ns is used for conducting laser burning on the substrate, the laser wavelength is 46.9 nm, laser is reflected and focused through grazing incidence of a toroidal mirror, and the toroidal mirror is not provided with a coating; irradiation of a single laser pulse or multiple laser pulses is carried out at the same position of the substrate; and (3) dense nano-particles are formed in the ablation area of the substrate treated in the step (2). Under the assistance of the single-layer graphene, the interaction between the nanosecond extreme ultraviolet laser and the glass substrate can induce the self-formation of the nano-particles, and the nano-particles are distributed in an ablation area controlled by focused EUV laser energy distribution.
Description
technical field [0001] The invention relates to the field of material surface particle preparation, in particular to a method for preparing material surface nanoparticles by using a laser. Background technique [0002] Laser ablation is a complex process because photon energy can be transferred into various forms, including electronic energy, thermal energy, chemical energy, mechanical energy, etc. Under different mechanisms, corresponding surface behaviors can be obtained, such as nanoparticles and periodic surface structures. The morphology of nanoparticles or nanostructures generated by laser processing can be controlled by adjusting the output parameters of the laser. In addition, the pollution caused by laser irradiation is also very small. Therefore, one can obtain a product with higher purity. [0003] There are many ways to generate nanoparticles with different lasers in different environments. In 1981, Smalley et al. used laser vaporization technology to obtain m...
Claims
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IPC IPC(8): C03C15/00B82Y40/00
CPCC03C15/00B82Y40/00
Inventor 崔怀愈赵东迪赵永蓬
Owner HARBIN INST OF TECH