Vibration measurement device and method based on filtering integrated optical chip
A technology integrating optics and chips, applied in the field of optoelectronic communication, can solve the problems of high cost, increase system cost, limit laser application scenarios, etc., and achieve the effect of narrowing line width, reducing cost and reducing volume
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Embodiment 1
[0043] like figure 1 The described vibration measuring device based on a filter integrated optical chip includes a laser 1, an integrated optical chip 2, a data processing module 4 and an emission lens 3; such as figure 2As shown, the integrated optical chip includes a coupler 21, a micro-ring modulator 22, a beam splitter 23, a phase shifter 24, a beam combiner 25, a coupler 2 26, and a mixer 27; through the micro-ring modulator 22 Filter the wavelength of the laser 1 to reduce the spectral width of the laser output from the laser 1, so as to realize the screening of the specific wavelength of the input optical signal, thereby realizing that the ordinary linewidth laser 1 replaces the narrow linewidth laser 1; the laser 1 The output laser enters the integrated optical chip 2 and the transmitting lens 3 in turn and focuses on the surface of the vibrating object. The vibration signal beam reflected by the surface of the vibrating object is received and processed by the integr...
Embodiment 2
[0052] like figure 1 The described vibration measuring device based on a filter integrated optical chip includes a laser 1, an integrated optical chip 2, a data processing module 4 and an emission lens 3; such as figure 2 As shown, the integrated optical chip 2 includes a coupler 21, a Mach-Zehnder structure 28, a beam splitter 23, a phase shifter 24, a beam combiner 25, a coupler 26, and a mixer 27; The structure 28 filters the wavelength of the laser 1, reduces the spectral width of the laser output from the laser 1, and realizes the screening of the specific wavelength of the input optical signal, thereby realizing that the ordinary linewidth laser 1 replaces the narrow linewidth laser 1; the laser 1 The output laser enters the integrated optical chip 2 and the transmitting lens 3 in turn and focuses on the surface of the vibrating object. The vibration signal beam reflected by the surface of the vibrating object is received and processed by the integrated optical chip 4,...
Embodiment 3
[0061] A vibration measurement method based on a filter integrated optical chip, characterized in that it comprises the following steps:
[0062] S1: Assuming that the distance detection system of the vibrating object surface is d, and the displacement signal of the vibrating object is s(t), the phase change caused by it is:
[0063]
[0064] Wherein, is the central wavelength of the light beam after passing through the micro-ring modulator 22 .
[0065] S2: The optical power output by the four ports in the mixer 27 can be expressed as:
[0066]
[0067] in, PM (t) is the phase modulation signal of the phase modulator, and its modulation frequency is usually much larger than the vibration frequency.
[0068] S3: Subtract the four port signals in the mixer 27 two by two to obtain the IQ two-channel signals, then divide the subtracted signals, and then perform the arc tangent operation to demodulate the phase information:
[0069]
[0070] separated by filtering, w...
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