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Method for improving triboelectricity output performance by inductively coupled plasma dry etching

A dry etching, inductive coupling technology, used in triboelectric generators, nanotechnology for materials and surface science, nanostructure manufacturing, etc. Sex-enhancing effects

Pending Publication Date: 2022-07-29
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, for practical applications, the electromechanical conversion efficiency of triboelectric nanogenerators still needs to be improved to meet the needs of high-efficiency energy harvesting and high-sensitivity information sensing.

Method used

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  • Method for improving triboelectricity output performance by inductively coupled plasma dry etching
  • Method for improving triboelectricity output performance by inductively coupled plasma dry etching
  • Method for improving triboelectricity output performance by inductively coupled plasma dry etching

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] The method for improving the triboelectric output performance of a polyvinyl chloride (PVC) film based on an inductively coupled plasma dry etching technology includes the following steps:

[0056] Step S1: cleaning of the PVC film: take a PVC film cut into 4*4cm and place it in anhydrous ethanol for ultrasonic cleaning for 10 minutes, then ultrasonically clean it with deionized water for 10 minutes, and then dry to obtain a clean PVC film;

[0057] Step S2: placing the cleaned PVC film in the carrier for plasma etching, and sending it into the cavity of the plasma dry etching equipment;

[0058]Step S3: the equipment is evacuated to keep the pressure stable, and the etching process is divided into two stages. The first stage: pass 15sccm O2, 45sccm CHF 3 , the ICP power is 100W, the RF power is 10W, and the etching time is 10min; the second stage: pass 50sccm C4F8, the ICP power is set to 100W, the RF power is 10W, and the etching time is 10s;

[0059] Step S4: after...

Embodiment 2

[0062] The steps of Example 2 are the same as those of Example 1, except that:

[0063] In step S3, the RF power is 20W;

[0064] In step S5, the etched PVC film ICP-2 is taken out;

Embodiment 3

[0066] The steps of Example 2 are the same as those of Example 1, except that:

[0067] In step S3, the RF power is 25W;

[0068] In step S5, the etched PVC film ICP-3 is taken out;

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Abstract

The invention discloses a method for improving triboelectricity output performance through inductive coupling plasma dry etching. Etching the upper surface of the film by using an inductively coupled plasma dry etching instrument to form a nano textured structure on the upper surface of the film; and performing deposition treatment on the upper surface of the film by using an inductively coupled plasma etching instrument, so that a fluorocarbon layer is deposited on the upper surface of the nano textured structure. According to the invention, a nano texture structure is constructed on the surface of the PVC film and a layer of fluorocarbon material is covered on the surface of the PVC film through an inductively coupled plasma dry etching treatment method, so that the triboelectric output performance of the film is improved.

Description

technical field [0001] The invention relates to a method for improving the triboelectric output performance of a polyvinyl chloride (PVC) film based on an inductively coupled plasma dry etching technology, which is characterized in that: Background technique [0002] Triboelectric nanogenerators (TENGs) show great application prospects in the fields of energy harvesting and information sensing due to the advantages of high output power, high conversion efficiency, wide material selection, simple fabrication, low cost, and light weight. It has received extensive attention and in-depth research. [0003] However, for practical applications, the electromechanical conversion efficiency of triboelectric nanogenerators still needs to be improved to meet the needs of high-efficiency energy harvesting and highly sensitive information sensing. Based on the surface charge effect, the triboelectric output performance of TENG has a quadratic relationship with the charge density of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00B82Y30/00B82Y40/00H02N1/04
CPCB82B3/0019B82Y40/00B82Y30/00H02N1/04
Inventor 应义斌代淑芬李逊甲平建峰
Owner ZHEJIANG UNIV
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