Welding method for ITO target material and Mo backboard
A welding method and target material technology, applied in the direction of climate sustainability, final product manufacturing, metal processing, etc., can solve the problems of low industrial production efficiency and high operation requirements, so as to ensure welding quality, avoid cracking, excellent electrical conductivity and The effect of thermal conductivity
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment 1
[0073] The present embodiment provides a welding method for an ITO target and a Mo backplane, and the welding method includes the following steps:
[0074] (1) The ITO target material and the Mo backplate are placed on the heating table together, and the ITO target material and the Mo backplate are heated to 190 ℃ through the first temperature rise, the second temperature rise, the third temperature rise, the fourth temperature rise and the fifth temperature rise; The first temperature rise is to raise the temperature to 60°C at 2.5°C / min, and keep for 5 minutes; the second temperature rise is to raise the temperature to 90°C at 2.5°C / min, and keep the temperature for 5 minutes; the third temperature rise is to raise the temperature to 120°C at 2.5°C / min, And keep the temperature for 5min; the fourth temperature rise is to raise the temperature to 150°C at 1.8°C / min, and keep the temperature for 9min; the fifth temperature rise is to raise the temperature to 190°C at 1.8°C / min;...
Embodiment 2
[0083] The present embodiment provides a welding method for an ITO target and a Mo backplane, and the welding method includes the following steps:
[0084](1) The ITO target material and the Mo backplate are placed on the heating table together, and the ITO target material and the Mo backplate are heated to 185 ° C through the first temperature rise, the second temperature rise, the third temperature rise, the fourth temperature rise and the fifth temperature rise; The first temperature rise is to raise the temperature to 55°C at 2°C / min, and keep for 4min; the second temperature rise is to raise the temperature to 85°C at 2°C / min, and keep the temperature for 4min; the third temperature rise is to raise the temperature to 115°C at 2°C / min, And keep the temperature for 4min; the fourth temperature rise is to raise the temperature to 145°C at 1.5°C / min, and keep the temperature for 8min; the fifth temperature rise is to raise the temperature to 185°C at 1.5°C / min;
[0085] When...
Embodiment 3
[0093] The present embodiment provides a welding method for an ITO target and a Mo backplane, and the welding method includes the following steps:
[0094] (1) The ITO target material and the Mo backplate are placed on the heating table together, and the ITO target material and the Mo backplate are heated to 195° C. through the first temperature rise, the second temperature rise, the third temperature rise, the fourth temperature rise and the fifth temperature rise; The first temperature rise is to raise the temperature to 65°C at 3°C / min, and keep for 6 minutes; the second temperature rise is to raise the temperature to 95°C at 3°C / min, and keep the temperature for 6 minutes; the third temperature rise is to raise the temperature to 125°C at 3°C / min, And keep the temperature for 6min; the fourth temperature rise is to raise the temperature to 155°C at 2°C / min, and keep the temperature for 10min; the fifth temperature rise is to raise the temperature to 195°C at 2°C / min;
[00...
PUM
Property | Measurement | Unit |
---|---|---|
Length | aaaaa | aaaaa |
Diameter | aaaaa | aaaaa |
Depth | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com