Liquid adjustable microlens array based on acoustics and microfluidic technology

Abstract

The liquid adjustable micro-lens array based on the acoustics and micro-fluidic technology comprises a liquid micro-lens array forming part, a first liquid inlet channel, a second liquid inlet channel and a liquid outlet channel, and the liquid micro-lens array forming part comprises a transparent regular polygon prism structure with a hollow cavity and a sound wave applying unit. The top end face of the regular polygon prism structure is open, and the sound wave applying unit is used for applying sound waves to each outer wall face of the regular polygon prism structure. The first liquid inlet channel and the second liquid inlet channel are respectively used for injecting first transparent liquid and second transparent liquid into the hollow cavity; the first transparent liquid and the second transparent liquid are mutually soluble or micro-soluble liquid with density difference. The liquid-adjustable micro-lens array is formed by conveying two kinds of mutually soluble or slightly soluble liquids with different densities into the hollow cavity, the implementation method is easy to operate, the cost is low, integration is easy, extremely high biocompatibility is achieved, and dynamic focusing of the adjustable micro-lens array can be achieved by changing the amplitude of sound waves.

Description

technical field [0001] The present application relates to the technical field of microlenses, in particular to a liquid tunable microlens array based on acoustic and microfluidic technologies. Background technique [0002] In recent years, with the development of optoelectronic devices such as sensors, photodetectors, cameras, and lasers, the core structure of these devices, microlens arrays, has also attracted extensive interest and research. Microlens arrays are composed of sub-lenses with diameters ranging from several hundred nanometers to several millimeters arranged periodically. They can effectively collect light and can be used in three-dimensional imaging, beam collimation, light homogenization, and microscanning. The current methods of manufacturing microlens arrays include thermal reflow method, direct writing method, mold replication method and inkjet printing method, but these methods usually produce miniaturized hard solid-state lenses whose focal length cannot...

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Problems solved by technology

[0003] The embodiment of the present application provides a liquid-tunable microlens array based on acoustic and microfluidic technology to solve the problem of miniaturization of the microlens array in the related art, the focal length cannot be adjusted or air pumps and polymer materials are required, and the biological affinity is reduced. Technical problems of increased equipment volume and process difficulty

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