Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Flexible cylindrical array of capacitive micro-machined ultrasonic transducer and preparation method of flexible cylindrical array

A capacitive micro-mechanical and ultrasonic transducer technology, applied in the field of MEMS, to achieve the effect of easy fabrication of two-dimensional area array, high sensitivity and wide frequency band

Active Publication Date: 2022-08-09
ZHONGBEI UNIV
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Piezoelectric ultrasonic transducers are used in current ultrasonic CT imaging systems. Piezoelectric ceramics are the most commonly used materials in ultrasonic transducers, but piezoelectric ceramic materials have technical bottlenecks in the application of ultrasonic CT equipment.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Flexible cylindrical array of capacitive micro-machined ultrasonic transducer and preparation method of flexible cylindrical array
  • Flexible cylindrical array of capacitive micro-machined ultrasonic transducer and preparation method of flexible cylindrical array
  • Flexible cylindrical array of capacitive micro-machined ultrasonic transducer and preparation method of flexible cylindrical array

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0037] In order to enable those skilled in the art to better understand the present invention, the present invention will be further clearly and completely described below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments in the present application and the features of the embodiments may be combined with each other in the case of no conflict.

[0038] A flexible cylindrical array of capacitive micromachined ultrasonic transducers, such as image 3 As shown, a plurality of identical curved surface arrays 6 are sequentially butt-jointed and assembled along the radial direction of the cylindrical array;

[0039] The structure of a single curved array 6 includes a mold 7, a flexible PCB board 1 and a CMUT wafer 3, such as figure 2 shown;

[0040] The mold 7 is made of resin material, and the shape of the mold 7 is a curved surface;

[0041] The flexible PCB board 1 is fixed on the inner surface of the mold 7;

[0042] The CMU...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
widthaaaaaaaaaa
Login to View More

Abstract

The invention discloses a flexible cylindrical array of a capacitive micro-machined ultrasonic transducer, and belongs to the technical field of MEMS. The cylindrical array is formed by butting and splicing a plurality of same curved surface arrays, each curved surface array is mainly composed of a mold, a flexible PCB and a CMUT wafer which are stacked, the CMUT wafer is cut to form a plurality of linear arrays, PDMS is filled among the linear arrays, the top surface of the CMUT wafer is provided with a metal upper electrode, and the bottom surface of the CMUT wafer is provided with a metal lower electrode. The flexible cylindrical array has the advantages of high density and high consistency, can surround the periphery of the mammary gland for screening, can realize detection of mammary gland tissues in a CMUT cylindrical array space with the aperture of 20cm, and has good cost and performance advantages in the field of ultrasonic imaging.

Description

technical field [0001] The invention belongs to the technical field of MEMS, in particular to a flexible cylindrical array of capacitive micromachined ultrasonic transducers and a preparation method thereof. Background technique [0002] Ultrasonic has the characteristics of good directionality, strong penetrating ability, easy concentration of sound energy, and long distance in water. , sterilization and other aspects, it has a wide range of applications in medicine, military, industry, agriculture and many other fields. With the rapid development of ultrasound technology, real-time three-dimensional ultrasound imaging has become a new trend in ultrasound imaging. Traditional two-dimensional ultrasound imaging technology can only obtain plane images, but cannot display the three-dimensional structure of biological tissue, and cannot determine the state of biological tissue in real time. Ultrasound imaging can reflect the distribution of biological tissues in a comprehensiv...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/02
CPCB06B1/0292
Inventor 王任鑫张文栋秦芸王智豪张国军杨玉华何常德崔建功张赛穆罕默德·伊尔马兹埃汉·博兹库尔特
Owner ZHONGBEI UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com