Chemical adsorbing liquid and prepn of chemical adsorbing film with the chemical adsorbing liquid
A chemical adsorption, solution technology, used in chemical recycling, devices for coating liquids on surfaces, nanotechnology for materials and surface science, etc., can solve problems such as difficult cleaning, and achieve high precision and good uniformity.
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[0026] The preparation method of the chemical adsorption membrane of the present invention comprises: dissolving the silane chemical adsorption substance in a mixed solvent containing the first non-aqueous organic solvent and the second non-aqueous organic solvent having a higher boiling point than the first non-aqueous organic solvent The process of preparing a chemical adsorption solution, the process of attaching the chemical adsorption solution to the surface of the substrate exposing the hydroxyl group in a dry atmosphere, volatilizing the first non-aqueous organic solvent in the chemical adsorption solution attached to the substrate and using A step of chemically bonding the end of the chemisorbed substance in the chemisorption solution to the surface of the substrate, and a step of cleaning the surface of the substrate with a cleaning solvent to remove the chemisorption solution remaining on the substrate.
[0027] When a volatile solvent is added to the chemisorption so...
Embodiment 1
[0054] A mixed solvent containing 99 parts by weight of hexamethylsiloxane (100° C. boiling point) and 1 part by weight of decamethyltetrasiloxane (190° C. boiling point) was prepared. CF as a silane chemical adsorption substance 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 It was dissolved in this mixed solvent to prepare a solution having a concentration of 0.5% by weight as a chemical adsorption solution.
[0055] After cleaning and degreasing the glass substrate 1 with a transparent electrode made of indium tin oxide alloy (ITO) on the surface, in a dry atmosphere at a temperature of 25°C and a relative humidity of 30% or less, press figure 1 As shown, it was immersed in the obtained chemical adsorption solution 2 for 1 min. After the glass substrate 1 was lifted up from the liquid, it was left in the same atmosphere for 5 minutes. The chemical adsorption solution attached to the surface of the substrate is preferentially volatilized due to its low boiling point organic solvent (he...
Embodiment 2
[0066] A mixed solvent containing 99.5 parts by weight of hexamethylsiloxane (100° C. boiling point) and 0.5 parts by weight of hexadecane (287° C. boiling point) was prepared.
[0067] Next, as a chemical adsorption substance containing 1:1 molar ratio 3 (CH 2 ) 14 SiCl 3 and C 6 h 5 CH=CHCOC 6 h 4 O(CH 2 ) 6 SiCl 3 The mixture was dissolved in the above-mentioned mixed solvent to prepare a solution having a concentration of 1% by weight as a chemical adsorption solution. Here, CH 3 (CH 2 ) 14 SiCl 3 It is a straight-chain hydrocarbon with a functional group controlling the surface energy of the coating at its end. On the other hand, C 6 h 5 CH=CHCOC 6 h 4 O(CH 2 ) 6 SiCl 3 There are photosensitive groups.
[0068] After the glass substrate with the transparent electrode made of ITO on the surface is cleaned and degreased, it is immersed in the obtained chemical adsorption solution for 1 min at a temperature of 25°C and a dry atmosphere with a relative h...
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Abstract
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