3-D machining method of micromechanical parts

A processing method and micro-mechanical technology, applied in computer control, instruments, simulators, etc., can solve problems such as difficult processing, limited processing materials, expensive equipment, etc.
CN1279414CInactive Publication Date: 2006-10-11HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HARBIN INST OF TECH
Publication Date
2006-10-11
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a three-dimensional processing method of a micromechanical part, which belongs to an ultra-precision processing method. Many existing processing methods of micro-mechanical parts have the disadvantages of only processing quasi-three-dimensional structures. Both methods of the present invention need to be realized in combination with the existing three-dimensional processing device for micromechanical parts: set the working parameters of the scanning probe microscope in sequence, place the sample on the three-dimensional workbench, and start by controlling the X and Y direction movement of the workbench Process the first graphic; when the first graphic is processed, the probe is raised, and the workbench moves two-dimensionally to process the next graphic until all the graphics are processed. Another method is that the three-dimensional workbench moves in the X, Y, and Z directions according to the preset value. After processing all the graphics at one time, the probe is lifted by scanning the pottery tube for contraction movement, and the processing is completed. The method of the invention can carry out real three-dimensional processing, the removal amount is at the nanometer level, and the damage to the surface is very small, and it can be applied to the manufacture of MEMS devices, masks and tiny molds.
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Description

technical field

[0001] The invention belongs to an ultra-precision processing method, in particular to a three-dimensional processing method for micromechanical parts. Background technique

[0002] The processing technology of micro-sized parts mainly has the following five methods: synchrotron radiation deep lithography, electroforming and plastic casting technology (LIGA processing technology), three-beam processing technology, micro electric discharge machining technology (EDM), rapid prototyping and Parts manufacturing technology (referred to as RPM, Rapid Protyping / Part Manufacturing) technology and processing technology based on scanning probe microscope. This paper mainly describes the status and development of micromachining based on scanning probe microscope.

[0003] 1. LIGA technology is derived from the semiconductor lithography process and uses photolithography to generate three-dimensional space micro-mechanical components at one time. Its disadvantages are: t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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