Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation

A double-beam resonator and frequency output technology, applied in the field of micro-electronic mechanical systems, can solve problems such as long response time, large distance between temperature measuring elements and measuring sensors, and difficulty in reflecting the real temperature of the measuring point.

Inactive Publication Date: 2002-11-27
XI AN JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the existing temperature sensors are large in size and have a long response time. If the temperature of the area to be measured changes rapidly, it is difficult to ensure that it responds synchronously with the measurement sensor to the temperature change.
In addition, in this ca

Method used

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  • Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation
  • Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation
  • Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation

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Embodiment

[0012] Example: see figure 1 , 2, including micro-bridge resonator 1, micro-cantilever temperature-sensitive element 2 and substrate 3, leads 4, amplifiers 8, 11, band-pass filter 9, phase shifter 10, data fusion unit 12 and constant voltage source 13.

[0013] The micro-bridge resonator 1 adopts the working mode of electrothermal excitation / varistor picking up vibration. The middle part of the micro-bridge resonator 1 is made with an excitation resistor 5 to excite the device to vibrate, and the fixed end is made with a piezo-sensitive bridge 6 to pick up the vibration signal; a diagonal of the piezo-sensitive bridge 6 at the root of the micro-bridge resonator 1 passes through The lead 4 is connected to the two input terminals of the differential amplifier 8, the output terminal of the differential amplifier 8 is connected to the input terminal of the band-pass filter 9 through the lead 4, and the output terminal of the band-pass filter 9 is connected to the phase shifter thr...

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Abstract

A frequency output type micromechanial dual-beam resonator with automatic temp. compensation function is composed of Si/SiO2 microbridge resonator and dual-layer microcantilever Si/SiO2 thermosensitive elements, which are made on a single chip. The output signal of said thermosensitive element can automatically compensate the influence of temp. to cross sensitivity of resonant frequency of microbridge resonator, so reducing the resonant frequency temp. coefficient of microbridge resonator and windening the working temp. range.

Description

1. Technical field [0001] The invention belongs to the field of micro-electro-mechanical systems (MEMS), in particular to a frequency output micro-mechanical double-beam resonator with temperature self-compensation function. 2. Background technology [0002] Micro-resonant sensors with mechanical resonance frequency based on silicon micro-machining technology are an important class of sensors. This type of microsensor has the advantages of quasi-digital signal output, strong anti-interference ability, low production cost, low power consumption, small size, light weight, and easy mass production. Micro-resonant sensors can use the resonant frequency, phase and resonant amplitude of resonant elements such as micro-cantilever beams, micro-bridges (double-end solid-supported beams) and square membranes to measure various physical quantities, such as pressure, vacuum, angular velocity, acceleration, and flow , temperature, humidity and gas composition. [0003] Micro-bridge res...

Claims

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Application Information

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IPC IPC(8): G01D5/00G01D21/02
Inventor 朱长纯韩建强刘君华
Owner XI AN JIAOTONG UNIV
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