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Pyrolyzing borium nitride crucible and method

A technology of boron nitride and pyrolysis, applied in chemical instruments and methods, nitrogen compounds, inorganic chemistry, etc.

Inactive Publication Date: 2003-03-05
GENERAL ELECTRIC CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It was previously impossible to predict the number of layers that would be peeled

Method used

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  • Pyrolyzing borium nitride crucible and method
  • Pyrolyzing borium nitride crucible and method
  • Pyrolyzing borium nitride crucible and method

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Experimental program
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Embodiment Construction

[0018] In accordance with the present invention, it has been found that the bond strength between individual PBN layers in a PBN crucible can be controllably varied by introducing dopants such as carbon and / or oxygen in selected layers so that dopant-based Concentration and separation intervals cause and control the sequence of PBN crucible exfoliation in each selected layer. The dopant should be introduced in separate steps during the deposition or the concentration of the dopant varied periodically so as to induce drastic and significant changes in concentration at selected intervals with respect to each selected layer.

[0019] The PBN deposit consists of laminated layers of PBN in which selected layers are preferentially weakened by the presence of dopants so as to induce exfoliation along the plane of each selected layer in the deposit. Therefore, when a PBN crucible formed of deposits is subjected to a fracture load (in-plane compression), radial tension, or peel load, c...

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Abstract

A method of forming a pyrolytic boron nitride (PBN) article and an article having layers of PBN separated by layers of PBN having a dopant of sufficient concentration to induce peeling, the steps of introducing vapors of ammonia and a gaseous boron halide in a suitable ratio into a heated furnace reactor to cause boron nitride to be deposited in layers on a substrate, with at least one gaseous dopant injected into furnace at controlled periodic interval(s) such that at least two selected layers of boron nitride are doped with said gaseous dopant(s) at a minimum average concentration of 2 atomic wt % at a depth ranging from 1000 to 2000 angstroms in each selected layer, and with the selected layers spaced apart about 0.1 micron to 100 microns apart.

Description

technical field [0001] The present invention relates to a pyrolytic boron nitride article having laminated layers of anisotropic boron nitride, wherein a plurality of selected layers are doped with a minimum concentration of dopant sufficient to preferentially induce anisotropic boron nitride in one or exfoliation in multiple selected layers, the invention also relates to a method of producing pyrolytic boron nitride articles consisting of laminated layers of anisotropic boron nitride, wherein dopants are introduced into a plurality of selected layers so as to preferentially cause delamination of one or more selected layers relative to a given surface of the crucible. Background technique [0002] Pyrolytic boron nitride is formed by chemical vapor deposition using the method disclosed in US Patent 3,182,006, the disclosure of which is incorporated herein by reference. The method involves mixing ammonia and a gaseous boron halide such as boron trichloride (BCl 3 ) vapor is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B21/064C04B35/583C04B41/50C04B41/87C23C16/34C23C16/38C23C16/44C23C16/455C30B11/00C30B15/10C30B35/00
CPCC04B41/87C04B2235/3865C04B2235/386C04B2235/3821C23C16/342C30B35/00C04B2235/723C04B41/009C04B2235/3873C04B2235/422C04B2235/80C23C16/45523C04B2235/721C04B2235/3826C30B15/10C04B2235/3856C04B41/5064C04B2235/3895C04B2235/3886C04B35/583Y10T428/30Y10T428/265Y10T428/24975C04B41/4531C04B35/522
Inventor A·Y·萨尼J·伦纳茨A·莫雷T·德万
Owner GENERAL ELECTRIC CO