Fault diagnosis of prodn. appts. and fault diagnosis system

Abstract

A method for diagnosing failure of a manufacturing apparatus, includes: measuring time series data of characteristics of a reference apparatus which conducts same processes as the manufacturing apparatus, and recording the time series data of the characteristics in a system information storage unit as a system information database; reading out a recipe listed in a process control information database recorded in a process control information storage unit; driving and controlling the manufacturing apparatus, measuring time series data of the characteristics as test data, and outputting the test data in real time, in accordance with the recipe; performing calculations on the test data, and creating failure diagnosis data; and diagnosing the failure of the manufacturing apparatus using the failure diagnosis data and the system information database.

Description

technical field [0001] The present invention relates to a fault diagnosis technology for production equipment, and more particularly, to a fault diagnosis method and a fault diagnosis system that manage the production equipment from a high level as a manufacturing process, and use a group controller and CIM that control the production equipment using a network or the like. Background technique [0002] In the manufacturing process of conventional semiconductor devices, unexpected failures of semiconductor manufacturing equipment cause unexpected production interruptions required for return from failure, increasing manufacturing costs from the viewpoint of the operating rate of semiconductor manufacturing equipment, especially It is the failure that occurs in the middle of the manufacturing process that will lead to an increase in the defects of the semiconductor device as the substrate to be processed, and the yield will be reduced due to discarding, which will directly incre...

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Problems solved by technology

[0005] In view of the above problems, the maintenance cost can be minimized by using the life limit of the device, and as a method of preventing unexpected failures, as a prediction method other than the average life, the temperature and current consumption of the exhaust pump system are constantly monitored. Setting the threshold, when the temperature and current value is above a certain set value, an alarm is issued, and the maintenance of the exhaust pump system is performed, but it is too troublesome

This is because in the state of limiting the semiconductor manufacturing device, in the case of using in a certain constant state, the threshold value is set on the basis of the typical value of the temperature, current, etc. In the case of the production of various types of semiconductor devices, the same semiconductor manufacturing equipment corresponds to the respective manufacturing processes of multiple types, so various process conditions are required, and there is a problem that the threshold value used as a criterion for predicting failure of semiconductor manufacturing equipment cannot be uniquely determined. exist

[0006] As mentioned above, in the case of supporting the production of multiple types of industrial products, in order to use the same production equipment to handle the respective manufacturing processes of multiple types of industrial products, various process conditions are required, and there is a possibility that the forecast production equipment cannot be uniquely determined. The problem of the threshold of the fault base

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