Detector head of doublet atomic force microscope

An atomic force microscope and detection head technology, applied in scanning probe microscopy, measuring devices, instruments, etc., can solve the problems of expensive operation requirements, dual STM limited conductivity, and restrictions on the development and popularization of nanotechnology, and achieve The effect of reducing Abbe error, eliminating nonlinearity and hysteresis effect

Inactive Publication Date: 2003-10-01
ZHEJIANG UNIV
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Problems solved by technology

At present, the application of AFM instruments in the world is relatively popular, but most of them can only be used for qualitative analysis, and the use of dual-unit STM (DIU-STM) that can be used for measurement is greatly limited by the conductanc

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  • Detector head of doublet atomic force microscope
  • Detector head of doublet atomic force microscope
  • Detector head of doublet atomic force microscope

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Embodiment Construction

[0010] The core component of the atomic force microscope is a probe composed of a scanning and feedback controller and a photoelectric detection system, which directly affects the detection resolution, detection accuracy, scanning range, and signal-to-noise ratio of the atomic force microscope. The purpose of the present invention is to invent a dual-element atomic force microscope detection head, so that the atomic force microscope system can obtain better nanometric and detection performance.

[0011] Such as figure 1 As shown, the dual-element atomic force microscope detection head of the present invention includes a photoelectric detection and feedback reference unit 1 composed of a laser, a position sensitive device (PSD), a half mirror, a micro-cantilever probe and Z-direction piezoelectric ceramics and The measuring unit 2 and the scanning control system 3 composed of XY piezoelectric ceramics, a sample stage, a reference sample and a sample to be tested are composed of...

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Abstract

A detecting head of dual-element atomic microscope is composed of a photoelectric detecting and feed-back reference unit which consists of laser, position sensitive device, half-transmitting mirror, microcantilever probe and Z-direction piezoelectric ceramics, measuring unit, and the scan control system consisting of XY piezoelectric ceramics, sample carrier, reference specimen and the sample to be detected. Its advantages are high precision (nano and submicron in length), and wide measuring range (5 microns).

Description

technical field [0001] The invention relates to an atomic force microscope detection head, which is used for nanometer detection and measurement of micro / nano materials and devices, in particular to a dual-element atomic force microscope detection head. Background technique [0002] With the invention of the scanning tunneling microscope, a cutting-edge technology with a length of 0.1 to 100 nanometers as the research object was born in the field of human science research, which is nanotechnology. At present, research on nanotechnology is emerging in many countries in the world. Scanning Probe Microscopy (SPM) technology and nano-detection technology represented by Scanning Tunneling Microscope (STM) and Atomic Force Microscope (AFM) have revealed a visible world of atoms and molecules to human beings with unprecedented resolution, and provided a basis for the development of nanotechnology. An important foundation has been laid for development. I...

Claims

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Application Information

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IPC IPC(8): G01Q60/24
CPCG01Q20/02G01Q70/06
Inventor 章海军林晓峰张冬仙
Owner ZHEJIANG UNIV
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