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Liquid phase atom mechanics microscope probe

A technology of atomic force microscope and liquid phase, applied in the direction of scanning probe microscopy, scanning probe technology, measuring devices, etc., can solve the problems of restricting the popularization and application of AFM, restricting the development and popularization of nanotechnology, and expensive operation requirements, etc. The technical conditions are easy to realize, the structure is simple, and the effect of meeting the requirements of the optical path

Inactive Publication Date: 2003-10-15
ZHEJIANG UNIV
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Problems solved by technology

Although the performance of imported instruments has become more and more perfect, it is undeniable that the high price of such instruments, strict operating requirements, and dependence on some key imported components have greatly restricted the promotion and application of AFM in China, thus to a large extent Restricts the development and popularization of nanotechnology in my country

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Embodiment Construction

[0009] The core components of the liquid phase atomic force microscope are probes composed of scanning and feedback controllers, photoelectric detection systems and liquid phase units, which directly affect the detection resolution, detection accuracy, scanning range and signal-to-noise ratio of the atomic force microscope. The purpose of the present invention is to invent a liquid-phase atomic force microscope probe, so that the atomic force microscope system can further expand its application range while obtaining better nanometer detection performance.

[0010] figure 1 Shown is a schematic diagram of the working principle of a liquid-phase atomic force microscope. The liquid-phase atomic force microscope probe of the present invention includes a scanning and feedback control system 1 composed of XYZ piezoelectric ceramics, a gas-liquid isolation disk and a micro-cantilever probe, and a photoelectric detection system 2 composed of a laser and a position sensitive device (PS...

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Abstract

The liquid phase atomic force microscope probe includes successively photoelectronic detection system comprising laser and position sensitive device; scanning and feedback controlling system comprising XYZ piezoelectric ceramic, gas-liquid isolating plate and micro cantilever probe; elevated liquid unit comprising sample, sample seat, liquid pond and elevating stage. The liquid phase atomic force microscope probe of the present invention is simple in structure, easy to realize technologically and widely suitable for measurement and observation of conductor, semiconductor and insulator samplein air, liquid or even electrochemical environment, and may find its wide application in various science, technology and industry fields.

Description

technical field [0001] The invention relates to an atomic force microscope probe used for nanometer detection of micro / nano materials and devices, in particular to a liquid-phase atomic force microscope probe. Background technique [0002] With the rapid development of nanotechnology, ultra-high resolution instruments such as scanning tunneling microscope (STM) and atomic force microscope (AFM) have become indispensable and important tools for nanotechnology workers. Among them, the application of AFM is more extensive. AFM is a high-precision, high-sensitivity surface observation and testing instrument, suitable for conductive and non-conductive samples, and capable of operating in most corrosive solutions and gases [4.5]. These superior properties not only make it possible to obtain data about the surface structure, but also directly and in real time observe and obtain valuable dynamic information of surface changes at the atomic or nanometer lev...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/38
CPCG01Q30/14B82Y35/00
Inventor 张冬仙章海军张虎
Owner ZHEJIANG UNIV
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