Manufacture of light-conducting board mold
A technology for a light guide plate and a manufacturing method, which is applied in the photoengraving process, optics, optomechanical equipment and other directions of the pattern surface, can solve the problems of expensive, unable to provide small lens molds with small volume and consistent shape, difficult equipment, etc.
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[0025] See first image 3 illustrate:
[0026] 1. At first select silicon substrate 1, which is a silicon wafer with 100 crystal orientation (Orientation) (see Figure 4 ).
[0027] 2. Put a layer of photoresist on the front and back of the silicon substrate 1 respectively to form an upper photoresist layer 2 and a lower photoresist layer 3 (see FIG. 5 ).
[0028] 3. The photoresist in the exposure and development area 4 is removed by exposure and development (refer to FIG. 6 ).
[0029] 4. Utilize Anisotropic wet etching to etch to form etching grooves 5 and inclined walls 6, and if they reach a certain depth, an included angle of 70.52° is formed (refer to FIGS. 7 and 8 ).
[0030] 5. Metal conductive layer 7 is evaporated (refer to Figure 9 ).
[0031] 6. Form the nickel (Ni) film layer 10 by electroforming again and remove the silicon substrate 1 to form an electroforming mold (refer to Figure 10 ).
[0032] 7. Inject the V-shaped concave groove light guide plate ...
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