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Nitrogen-containing titanium dioxide photocatalytic film and preparing method thereof

A photocatalytic thin film, titanium dioxide technology, applied in the direction of catalyst activation/preparation, chemical instruments and methods, physical/chemical process catalysts, etc., to achieve the effect of improving degradation ability

Inactive Publication Date: 2003-11-12
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the modification of the surface of the film can improve the photocatalytic ability of the film to a certain extent, the film still needs to be excited by an ultraviolet light source to show the photocatalytic performance.

Method used

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  • Nitrogen-containing titanium dioxide photocatalytic film and preparing method thereof
  • Nitrogen-containing titanium dioxide photocatalytic film and preparing method thereof
  • Nitrogen-containing titanium dioxide photocatalytic film and preparing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] 1) Take glass sheet as the carrier, after cleaning, put it into the vacuum coating equipment with pure metal titanium target, the background vacuum is 3.0×10 -3 Pa;

[0019] 2) Using intermediate frequency reactive magnetron sputtering:

[0020] Medium frequency AC arc suppression power supply with a frequency of 15kHz and a current density of 3mA / cm 2 ,

[0021] The working gas is 99.999% high-purity argon, and its pressure is controlled by an automatic pressure controller to 1.0Pa;

[0022] The reaction gas is a mixed gas of high-purity oxygen and nitrogen, and the partial pressure is controlled by a mass flow controller to be 0.8Pa, wherein nitrogen accounts for 40% of the total flow of the reaction gas;

[0023] The carrier temperature (substrate temperature) during film deposition is 150°C;

[0024] The magnetron sputtering time is 60 minutes.

[0025] Under the above conditions, the obtained nitrogen-containing titanium dioxide photocatalytic film is composed...

Embodiment 2～4

[0026] Example

[0027] Table 1

Embodiment 2

[0028] After the end of Example 2, the obtained nitrogen-containing titanium dioxide photocatalytic film is composed of a mixture of amorphous and anatase phases, nitrogen exists only in an interstitial state, and the content of nitrogen is 0.7%. The absorption limit of the film was measured at 461 nm by ultraviolet and visible light spectrophotometer. The photocatalytic experiment proves that the photocatalytic degradation ability of this film is three times that of the titanium dioxide film.

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Abstract

The invention is titanie oxide light catalyzing film which comprises nitrogen and the manufacturing method, it refers to semiconductor light catalyzing technology field, especially refers to titanie oxide light catalyzing film field. It contains nitrogen which accounts for 0.1-5%; the manufacturing method is magnetism control sputtering method, the character lies in: the reaction gas in the mixed gas of high purity oxygen and nitrogen, the nitrogen content is 5%-95%. The film decreases the forbidden bind breadth of semiconductor light catalyst, makes the film has absorption ability to visible light, and it has catalyzing and decomposing ability to the organic contamination by the irradiation of visible light. Compared with pure titanie oxide light catalyzing film, its decomposing ability is enhanced greatly by the irradiation of ultraviolet.

Description

Technical field: [0001] The nitrogen-containing titanium dioxide photocatalytic thin film and a preparation method thereof relate to the technical field of semiconductor photocatalysis, in particular to the technical field of titanium dioxide photocatalytic thin film. Background technique: [0002] Pesticides are toxic chemical substances used in agriculture to prevent and control diseases, insects, and weeds. The long-term and large-scale use of pesticides has not only achieved benefits, but also produced extensive side effects, such as pollution of water sources, air, and agricultural products. Among them, The pollution of water sources is very harmful. Pesticides in the environment can enter the human body through the digestive tract, respiratory tract and skin, causing various hazards, such as organophosphorus pesticides such as dichlorvos. Short-term ingestion of large amounts of organophosphorus pesticides can cause acute poisoning. Therefore, it is of great signific...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J21/06B01J35/00B01J37/02C23C14/08
Inventor 庄大明张弓赵明侯亚奇方玲杨波
Owner TSINGHUA UNIV
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