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Acoustic surface wave component

A surface acoustic wave and component technology, applied in the field of surface acoustic wave components, can solve the problems of small crystal lattice, defect adaptability, quartz without buffer layer, etc., and achieve long life, high acoustic displacement resistance, and the effect of reducing acoustic displacement.

Inactive Publication Date: 2003-11-19
INST FUER FESTKOERPER & WERKSTOFFORSCHUNG DRESDEN EV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Furthermore, it is generally difficult to fabricate single crystal copper, since, according to current knowledge, this requires little accommodation of lattice defects between the layer and the substrate, so for the most commonly used piezoelectric substrate materials such as LiNbO 3 , LiTaO 3 Or quartz cannot be implemented without a buffer layer

Method used

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  • Acoustic surface wave component
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Examples

Experimental program
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Embodiment Construction

[0026] figure 1 FIG. 3 shows a strip 1 in a strip-shaped structure, which is deposited on a piezoelectric material 2 . The ribbon structure is composed of silver doped with 1.0 atomic %. Voltage materials such as single crystal LiNbO can be used 3 、LiTO 3 , SiO 2 , La 3 Ga 5 SiO 14 , Li 2 B 4 o 7 , GaPO 4 , ZnO or AlN composition. the upper side of strap 1, and the figure 2 and in Fig. 3 also the underside of the strip 1, covered with a diffusion barrier layer 8 made of TaN which in particular blocks O 2 and Cu. In the arrangement according to FIG. 3 , between the strip 1 and the piezoelectric material 2 there is also an adhesion-assisting layer 9 made of Ta, which at the same time also acts as a diffusion barrier 8 . In FIG. 4 , strip 1 is embedded in a depression 3 dug into piezoelectric material 2 and is completely surrounded on all sides by diffusion barrier 8 .

[0027] exist Figure 5 In the arrangement shown the ribbon 1 is embedded in a depression 5 d...

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Abstract

The invention relates to an acoustic surface wave component in which metallic strip structures are mechanically coupled to a piezoelectric material. The aim of the invention is to design surface wave components of this type in which the metallic strip structures consist of Cu whereby, even in the occurrence of a high level of stress exerted on the components, being able to noticeably reduce or completely prevent the acoustic migration on the strip structures with technical measures that can be realized in the simplest possible manner. To this end, the invention provides that the metallic strip structures comprise a polycrystalline and / or nanocrystalline structure and / or exist in the amorphous state and are comprised of a Cu base material with an admixture of 0 atom % to a maximum of 10 atom % of one or more other metallic elements, of an alloy and / or of a compound. In addition, the strip structures are coated or surrounded by one or more diffusion barrier layers. The inventive components can be used, for example, as filters, acousto-optical modulators, actuators, convolvers or sensors.

Description

technical field [0001] The present invention relates to a surface acoustic wave component in which a metal strip structure is mechanically connected to a piezoelectric material. Such components can be used, for example, as filters, acousto-optic modules, actuators, convolutions or sensors. Background technique [0002] Surface acoustic wave elements known as ribbon structures are based on Al and are subject to acoustically induced movement, especially when high powers and large amplitudes are achieved. As a result, the active substance of the band structure is displaced locally and on the one hand leads to a break in the building space and the band structure and on the other hand to the appearance of raised hillocks and their lateral expansion. Another damage feature appears as localized delamination of the banded structure. These changes impair the function of the component, for example, in the filter, filter frequency drift, or changes in the overall filter characteristi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/09H01L41/08H01L41/18H03H9/02H03H9/145
CPCH03H9/02929H03H9/02874H03H9/02866
Inventor 西格弗雷德·门策尔哈根·思密德曼弗雷德·韦纳夫特
Owner INST FUER FESTKOERPER & WERKSTOFFORSCHUNG DRESDEN EV