Excited quasi-molecule lamp

An excimer lamp, outer tube technology, applied in discharge lamps, electrical components, circuits, etc., can solve problems such as breakage, reduced lamp illumination, and reduced lamp life.

Inactive Publication Date: 2004-05-05
ORC MFG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to this extreme embedding, a conductive substance having an expansion rate different from that of the dielectric is also embedding, so that microcracks and the like are generated in the discharge tube, which promotes breakage, thereby shortening the life of the lamp.
In addition, for the composite body mixed with glass, when the printed electrode is sintered, the glass remains in the opening of the electrode, which reduces the illuminance of the lamp.

Method used

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  • Excited quasi-molecule lamp

Examples

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Embodiment Construction

[0016] The configuration and operation of a preferred embodiment of the excimer lamp according to the present invention will be described below with reference to the drawings.

[0017] figure 1 is a longitudinal sectional view of an embodiment of an excimer lamp according to the present invention, figure 2 It is an enlarged view showing a part of the outer electrode of the excimer lamp. Such as figure 1 As shown, the excimer lamp includes: a discharge tube 10, which is composed of a coaxial inner tube 11 and an outer tube 12, the two ends of which are joined by a joint 16 to form a closed end; an inner electrode 13, which is arranged on the inner surface of the inner tube 11; and the outer electrode 14, which is provided on the outer surface of the outer tube.

[0018] By applying a high voltage from a high-voltage AC power supply 9 between the inner electrode 13 and the outer electrode 14, the discharge gas (rare gas such as argon, krypton, xenon, etc.) sealed in the inte...

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PUM

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Abstract

Provided is an excimer lamp having an outer electrode that can be manufactured at low cost with reliability. The excimer lamp comprises a discharge tube 10 having an inner tube 11 and an outer tube 12, formed as coaxial cylinders. A high voltage is applied between an inner electrode 15 inside the inner tube 11 and the outer electrode 14 arranged on outside surface of the outer tube 12 to cause the gas encapsulated in a space 15 between the inner tube 11 and the outer tube 12 to perform discharge light emission. The outer electrode 14 is formed by transferring a metal electrode pattern from a transferring paper to the surface of the outer tube 12, and baked. In an embodiment, the outer electrode 14 is a mesh having an open area ratio of 70% or more. The outer electrode 14 is formed of a metal or a metal alloy made of two or more metals out of gold, silver, platinum, nickel, or chromium.

Description

technical field [0001] The invention relates to an excimer lamp (dielectric barrier discharge lamp), in particular to a mesh-shaped outer electrode formed on the outer surface of an outer tube of the excimer lamp. Background technique [0002] Excimer lamps are widely used in ultraviolet exposure devices and the like in the manufacturing process of electronic components such as semiconductor integrated circuits, liquid crystal display panels, and printed circuit boards. The prior art related to excimer lamps is described in, for example, "High-Intensity Light Irradiation Device (High-Intensity Light Irradiation Device)" in JP-A-2000-223078 and "Dielectric Barrier Discharge Lamp (Yuiden) in JP-A-2001-23577." Body baria discharge lamp)" etc. are disclosed. [0003] The existing excimer lamp basically has a discharge tube composed of a coaxial inner tube and an outer tube, and by applying a high voltage between the inner electrode on the inner surface of the inner tube and the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J65/00
Inventor 见代修一石桥纪雄
Owner ORC MFG
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