Elastic surface wave element suitable for gigahertz frequency band

A surface acoustic wave and surface wave technology, applied in electrical components, impedance networks, etc., can solve problems such as no records, and achieve the effect of suppressing the increase in resistance, reducing insertion loss, and improving the performance of stress migration resistance.

Inactive Publication Date: 2004-05-26
ALPS ALPINE CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, Patent Document 1 does not describe either the experimental value or the calculated value as the basis for specifying the film thickness range.
[0021] That is, until now, when a LiTaO3 single crystal is used as a piezoelectric substrate material and Cu or a Cu alloy is used to form a surface acoustic wave device, it has not been possible to obtain the cut angle θ and the minimum film thickness of a LiTaO3 single crystal for obtaining good characteristics. thick relationship

Method used

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  • Elastic surface wave element suitable for gigahertz frequency band
  • Elastic surface wave element suitable for gigahertz frequency band
  • Elastic surface wave element suitable for gigahertz frequency band

Examples

Experimental program
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Embodiment Construction

[0037] figure 1 It is a plan view showing a surface acoustic wave device according to an embodiment of the present invention.

[0038] Reference numeral 11 denotes a surface acoustic wave element which functions as a resonator.

[0039] Reference numeral 12 denotes a piezoelectric substrate. In this embodiment, the piezoelectric substrate 12 is formed of LiTaO3.

[0040]Comb-tooth-shaped electrode portions 13 and comb-tooth-shaped electrode portions 14 are formed on the piezoelectric substrate 12 . A comb-toothed portion 13 a extending in a direction opposite to the illustrated X3 direction and a comb-toothed portion 14 a extending in the illustrated X3 direction are formed in the comb-toothed electrode portion 13 and the comb-toothed electrode portion 14 . The comb-toothed portion 13 a of the comb-toothed electrode portion 13 and the comb-toothed portion 14 a of the comb-toothed electrode portion 14 are arranged at predetermined intervals so as to be different from each ot...

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Abstract

IDT electrodes are formed by a Cu alloy. When the wavelength of a SAW propagating in the direction of the X axis of a piezoelectric substrate is indicated by lambda, and when the thickness of the IDT electrodes is indicated by H, the standardized thickness H / lambda of the IDT electrodes ranges from 0.045 to 0.070, and the piezoelectric substrate is a rotated Y-cut LiTaO3 substrate whose rotational cut angle [theta] from the Y axis to the Z axis around the X axis ranges from 52.0 DEG to 58.0 DEG . With this arrangement, the reflection coefficient S11 becomes 0.88 or higher.

Description

technical field [0001] The present invention relates to a surface acoustic wave device capable of improving resonance characteristics in a high-frequency band. Background technique [0002] Surface acoustic wave devices are electronic components that use mechanical vibration energy concentrated only near the solid surface to transmit surface acoustic waves, and can be used to form filters, resonators, or duplexers. [0003] In recent years, the miniaturization and weight reduction of mobile communication terminals such as mobile phones have been rapidly progressing, and therefore there has been an increasing demand for miniaturization of electronic components mounted on these mobile communication terminals. [0004] A surface acoustic wave device has a pair of comb-shaped electrodes (IDT (Interdigital Transformer) electrodes) made of a material with good conductivity and low specific gravity facing each other on the surface of a piezoelectric substrate and arranged side by s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/08H03H9/02H03H9/145H03H9/25
CPCH03H9/02559H03H9/14538H03H3/08H03H9/145
Inventor 尾崎恭辅和贺聪藤本晴彦佐藤崇松尾裕池田刚金子一明工藤拓夫
Owner ALPS ALPINE CO LTD
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