Carbon nanometer tube array structure and growing method thereof

Abstract

A carbon nanotube array structure is composed of a substrate, the alloy catalyst particles on the substrate, which contains the material to affect the growth speed of carbon nanotubes, and the array the carbon nanotubes which is grown from said alloy catalyst particles and bent toward a predefined direction. Its growing process includes such steps as generating a catalyst layer on the substrate, depositing at least two kinds of growth speed regulating material, annealing in oxygen contained gas to change the catalyst layer to catalyst particles, introducing carbon source gas, and growing carbon nanotubes.

Description

【Technical field】 [0001] The invention relates to a carbon nanotube array structure and a growth method thereof. 【Background technique】 [0002] Due to the unique electrical properties of carbon nanotubes, their applications in the fields of nano-integrated circuits and single-molecule devices have immeasurable prospects. At present, people have been able to manufacture a small amount of carbon nanotube-based field effect transistors, logic devices, and storage devices in the laboratory, and have studied its properties. For details, please refer to Sander J Tans et al. published in Nature 393-49 in 1998, Room-temperature transistor based on a single carbon nanotube article. But for large-scale preparation and practical application, we must resort to bottom-up (Bottom Up) preparation process. [0003] The bottom-up preparation process requires the ability to control the growth position, direction, size, length, and even the helicity of carbon nanotubes, and directly grow th...

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Problems solved by technology

[0007] However, in the above methods, the method of using electric field to control the growth direction of carbon nanotubes will increase the complexity of device design, and because of the wide area of ​​the electric field itself, it is difficult to realize the control of multiple local growth directions.

These factors limit the diversification and practicability of carbon nanotube device design. Therefore, it is necessary to develop a local carbon nanotube growth direction control method that does not require an external field.

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