Baking method for ceramic plate and producing method

A technology of ceramic plates and ceramics, applied in the firing field of piezoelectric ceramic plates, can solve problems such as damage, poor shape, unsuitable sintered body, etc., and achieve the effect of preventing warping or bending
CN1532168AInactive Publication Date: 2004-09-29TDK CORPARATION

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TDK CORPARATION
Publication Date
2004-09-29
Estimated Expiration
Not applicable · inactive patent

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Abstract

To provide a method of firing a ceramic plate by which the occurrence of the warpage or waviness of the ceramic plate after firing can be prevented.The ceramic plate 2 is arranged on a zirconia setter 1 between opposed zirconia setters 1 and 5. The periphery part of the ceramic plate 2 is surrounded by a surrounding member 4 composed of a ceramic material having the sane composition as the ceramic plate 2 and the ceramic plate 2 is fired. As a result, lead in lead titanozirconate is released into a gap S between the ceramic plate 2 and the zirconia setter 5 from each surrounding member 4. The evaporation of lead in the lead titanozirconate from the ceramic plate 2 is suppressed and the concentration of lead in the gap S is kept uniform during the firing. Then, the occurrence of the warpage or the waviness of the ceramic plate 2 after firing can be prevented. (C)2005,JPO&NCIPI.
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Description

technical field

[0001] The present invention relates to a firing method and a manufacturing method of a ceramic plate, and more particularly to a firing method and a manufacturing method of a piezoelectric ceramic plate used for a laminated piezoelectric substrate such as a piezoelectric actuator or a piezoelectric sensor. Background technique

[0002] Conventionally, piezoelectric ceramics containing lead titanate and lead zirconate titanate as main components are known as lead-containing ceramics. In addition, the piezoelectric ceramics are used in various products such as ceramic vibrators, ceramic filters, piezoelectric buzzers, piezoelectric sensors, and piezoelectric actuators. Among piezoelectric ceramics used in these products, there are substrates (piezoelectric ceramic plates) made of piezoelectric materials, or laminates in which the substrate and internal electrode layers are alternately laminated, which has been actively studied in recent years.

[0003] Here, ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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