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Substrate for optical element, organic electroluminescence element and organic electroluminescence display device

A technology of optical elements and light-transmitting substrates, which is applied in the field of organic electroluminescent display devices, and can solve the problems of increasing the area where an electric field cannot be applied, insufficient light extraction efficiency, and ineffective extraction.

Active Publication Date: 2005-02-09
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the invention disclosed in Japanese Patent Application Laid-Open No. 2002-260844 reduces the light emitting area of ​​the device, and thus does not significantly improve
[0015] Furthermore, in the invention disclosed in Japanese Patent Application Laid-Open No. 2002-260866, the area in which an electric field cannot be applied is increased, so there is no significant improvement as in the above invention
[0016] Furthermore, in the invention disclosed in Japanese Patent Application Laid-Open No. 2002-260845, it is not possible to efficiently extract light having an exit angle exceeding the critical angle
Furthermore, Japanese Patent Application Laid-Open No. 2002-260845 describes that performance is improved when light angle changing means are distributed over the entire substrate (the Figure 10 and corresponding Figure 10 Paragraph 0032 in the description of ), however, there is a problem that if there are multiple diffusers in the thickness direction, the substrate becomes white, thus reducing the color purity of the emitted light
[0017] As mentioned above, the light extraction efficiency of organic electroluminescence is still insufficient

Method used

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  • Substrate for optical element, organic electroluminescence element and organic electroluminescence display device
  • Substrate for optical element, organic electroluminescence element and organic electroluminescence display device
  • Substrate for optical element, organic electroluminescence element and organic electroluminescence display device

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example 1

[0075] A positive type resist material was formed to a thickness of 4000 Å on a quartz substrate (refractive index: 1.457) using a spin coater as a photoresist material, and then patterned using a photomask.

[0076] As a light source, a Hg-Xe lamp (wavelength: 250 nm) was used. Here, a stripe mask pattern with a period of 1.0 μm, a line width of 0.75 μm, and a space width of 0.25 μm was used. Using this mask, after exposure once, the mask was rotated by 90° and exposed again under the same conditions. After this exposure, the mask is treated with an alkaline developer to form a resist pattern. As a result of SEM observation, it was confirmed that the target grating pattern could be produced. The quartz substrate attached to the fabricated resist pattern was etched by reactive gas etching (Samuco, RIE1ONR). Under the condition of 100W output, use CF 4 (4Pa, 20SCCM) for etching. Etching was performed to form a trench of 10000 Å on the quartz substrate during 2080 seconds. ...

example 2

[0083] A positive-type resist material with a thickness of 4000 Å was formed on a quartz substrate (refractive index: 1.457) using a spin coater as a photoresist material, and then the formed photoresist was detected by a two-flux laser interference exposure system. The resist is exposed. As a laser light source used in this two-flux laser interference exposure system, an Ar ion laser (wavelength: 488 nm) was used, and exposure was performed under the following conditions.

[0084] The laser light is divided into two luminous fluxes with a beam splitter, and the interference exposure is carried out using a reflector, so that the intersection angle on the substrate surface becomes about 31 degrees (laser luminous intensity: 100mA / cm 2 , exposure time: 15 seconds). After performing this exposure once, the substrate was rotated by 90°, and exposure was performed again using the same conditions.

[0085] After exposure, it was processed by an alkaline developer AZ300MIF (manufac...

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PUM

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Abstract

The present invention uses a substrate for an optical element comprising a light scattering unit

Description

[0001] Comparison of related applications [0002] This application claims priority from Japanese Patent Application No. 2003-282202 filed on July 29, 2003, the contents of which are incorporated herein by reference. technical field [0003] The present invention relates to a substrate for an optical element that emits light of a specific wavelength range by current driving, an optical element using the substrate, and an organic electroluminescence display device used as a display device. Background technique [0004] An organic electroluminescent (organic EL) device is a light emitting device utilizing the principle that a fluorescent material emits light by recombination between holes injected from an anode and electrons injected from a cathode by applying an electric field. Since C.W.Tang et al. reported a low-voltage-driven organic electroluminescence display with stacked devices (C.W.Tang, S.A. VanSlyke, Applied Physics Letter, Vol. 51, Page 913, 1987), people have wide...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B33/02G09F9/30H01J1/62H01J63/04H01L27/32H01L51/00H01L51/50H01L51/52H05B33/12H05B33/14H05B33/22
CPCH01L51/5262H01L27/3244H01L51/5268H01L51/0096Y02E10/50Y02E10/549H10K59/12H10K77/10H10K59/877A22C25/22A22C25/08A22C25/003H10K50/85H10K50/854
Inventor 五藤智久东口达上条敦大西康晴石川仁志山成淳一
Owner SAMSUNG DISPLAY CO LTD
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